Catadioptric Projection Objective With Intermediate Images

ABSTRACT

A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.

This application is a Continuation of U.S. application Ser. No. 13/361,707, filed on Jan. 30, 2012, which is a Continuation of U.S. application Ser. No. 11/596,868, filed on Oct. 6, 2008, now U.S. Pat. No. 8,107,162, issued on Jan. 31, 2012, which was the National Stage of International Application No. PCT/EP2005/005250, filed on May 13, 2005, which claims the benefit of U.S. Provisional Application No. 60/571,533 filed on May 17, 2004. All of these prior applications are hereby incorporated into the present application in their entireties by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates to a catadioptric projection objective for imaging of a pattern, which is arranged on the object plane of the projection objective, on the image plane of the projection objective.

2. Description of the Related Art

Projection objectives such as these are used in microlithography projection exposure systems for the production of semiconductor components and other finely structured components. They are used to project patterns of photomasks or reticles which are referred to in the following text in a general form as masks or reticles, onto an object which is coated with a light-sensitive layer, with very high resolution and on a reduced scale.

In this case, in order to produce ever finer structures, it is necessary on the one hand to enlarge the image-side numerical aperture (NA) of the projection objective, and on the other hand to use ever shorter wavelengths, preferably ultraviolet light at wavelengths of less than about 260 nm, for example 248 nm, 193 nm or 157 nm.

In the past, purely refractive projection objectives have been predominantly used for optical lithography. These are distinguished by a mechanically relatively simple, centered design, which has only a single optical axis, that is not folded. Furthermore, it is possible to use object fields which are centered with respect to the optical axis, which minimize the light transmission level to be corrected, and simplify adjustment of the objective.

However, the form of the refractive design is primarily characterized by two elementary imaging errors: the chromatic correction and the correction for the Petzval sum (image field curvature).

Catadioptric designs, which have at least one catadioptric objective part and a hollow mirror or a concave mirror, are used to simplify the correction for the Petzval condition and to provide a capability for chromatic correction. In this case, the Petzval correction is achieved by the curvature of the concave mirror and negative lenses in its vicinity, while the chromatic correction is achieved by the refractive power of the negative lenses upstream of the concave mirror (for CHL) as well as the diaphragm position with respect to the concave mirror (CHV).

One disadvantage of catadioptric designs with beam splitting is, however, that it is necessary to work either with off-axis object fields, that is to say with an increased light conductance value (in systems using geometric beam splitting) or with physical beam splitter elements, which generally cause polarization problems. The term “light conductance value” as used here refers to the Lagrange optical invariant or Etendue, which is defined here as the product of the image field diameter and the image-side numerical aperture.

In the case of off-axis catadioptric systems, that is to say in the case of systems with geometric beam splitting, the requirements for the optical design can be formulated as follows: (1) reduce the light transmission level to the maximum extent, (2) design the geometry of the foldings (beam deflections) such that a mounting technology can be developed for this purpose, and (3) provide effective correction, in particular the capability to correct the Petzval sum and the chromatic aberrations jointly in the catadioptric mirror group.

In order to keep the geometric light conductance value (Etendue) low, the folding of the design should in principle take place in the region of low NA, that is to say for example close to the object, or in the vicinity of a real intermediate image.

However, as the numeric aperture increases, the object-side numerical aperture also increases, and thus the distance between the first folding mirror and the reticle, so that the light transmission level rises. Furthermore, the diameter of the hollow mirror and the size of the folding mirror increase. This can lead to physical installation space problems.

These can be overcome by first of all imaging the reticle by means of a first relay system onto an intermediate image, and by carrying out the first folding in the area of the intermediate image. A catadioptric system such as this is disclosed in EP 1 191 378 A1. This has a refractive relay system, followed by a catadioptric objective part with a concave mirror. The light falls from the object plane onto a folding mirror (deflection mirror) which is located in the vicinity of the first intermediate image, from there to the concave mirror and from there onto a refractive object part, with a second real intermediate image being generated in the vicinity of a second deflection mirror, and the refractive object part images the second intermediate image on the image plane (wafer). Concatenated systems having, in that sequence, a refractive (R), a catadioptric (C), and a refractive (R) imaging subsystem will be denoted “R-C-R” type systems in the following.

Systems of type R-C-R with a similar folding geometry are disclosed in WO 2004/019128 A, WO 03/036361 A1 and US 2002/019946 A1. Patent application US 2004/0233405 A1 discloses R-C-R type projection objectives with different folding geometries including objectives where the first folding mirror is arranged optically downstream of the concave mirror to deflect radiation coming from the concave mirror towards the image plane.

Other catadioptric systems with two real intermediate images are disclosed in JP 2002-372668 and in U.S. Pat. No. 5,636,066. WO 02/082159 A1 and WO 01/04682 disclose other catadioptric systems with more than one intermediate image.

SUMMARY OF THE INVENTION

It is one object of the invention to provide a catadioptric projection objective which allows very high resolutions to be achieved, with a compact design with optimized dimensions. It is another object to allow correction of the Petzval sum and of the chromatic aberrations with good manufacturing conditions.

As a solution to these and other objects this invention, according to one formulation, provides a catadioptric projection objective for imaging of a pattern, which is arranged on the object plane of the projection objective, on the image plane of the projection objective, having: a first objective part for imaging of an object field to form a first real intermediate image; a second objective part for generating a second real intermediate image using the radiation coming from the first objective part; and a third objective part for imaging the second real intermediate image on the image plane; wherein the second objective part is a catadioptric objective part with a concave mirror; a first folding mirror for deflecting the radiation coming from the object plane in the direction of the concave mirror and a second folding mirror for deflecting the radiation coming from the concave mirror in the direction of the image plane are provided; and a field lens with a positive refractive power is arranged between the first intermediate image and the concave mirror, in a region close to the field of the first intermediate image.

According to another formulation, a field lens with a positive refractive power is arranged geometrically between the first folding mirror and the concave mirror in a region close to the field of the first intermediate image. This position is optically between the first intermediate image and the concave mirror if the first intermediate image is created optically upstream, i.e. before the field lens in light propagation direction. The first intermediate image may also be positioned optically downstream, i.e. behind the field lens, or may partly extend into the field lens.

The enlargement of the numerical aperture which is required in order to achieve very high resolutions frequently leads in conventional systems to a major increase in the diameter of the optical components which are located in the area of preferred diaphragm positions. The invention counteracts this effect.

The expression “field lens” describes an individual lens or a lens group with at least two individual lenses. The expression takes account of the fact that the function of a lens can fundamentally also be carried out by two or more lenses (splitting of lenses). The refractive power of this field lens is arranged close to the field, that is to say in the optical vicinity of a field plane. This area close to the field for a field plane is distinguished in particular by the chief ray height of the imaging being large in comparison to the marginal ray height. In this case, the marginal ray height is the ray height of a marginal ray which leads from the innermost point of the object field, which is closest to the optical axis, to an edge of an aperture diaphragm, while the chief ray (principal ray) leads from the outermost field point of the object field parallel to, or at an acute angle to, the optical axis and intersects the optical axis in the area of the system diaphragm, that is to say at a diaphragm location which is suitable for the fitting of an aperture diaphragm. The ratio between the marginal ray height and the chief ray height is thus less than unity in the area close to the field.

The expression “intermediate image” describes the area between a paraxial intermediate image and an marginal ray intermediate image. Depending on the correction state of the intermediate image, this area may extend over a certain axial range in which case, by way of example, the paraxial intermediate image may be located in the light path upstream or downstream of the marginal ray intermediate image, depending on the spherical aberration (undercorreaction or overcorrection). The paraxial intermediate image and the marginal ray intermediate image may also essentially coincide. For the purposes of this application, an optical element A, for example a field lens, is located “between” an intermediate image and another optical element B when at least a portion of the optical element A is located between the (generally axially extended) intermediate image and the optical element B. The intermediate image may thus also partially extend beyond an optical surface which, for example, may be advantageous for correction purposes. The intermediate image is frequently located completely outside optical elements. Since the radiation energy density in the intermediate image area is particularly high, this may be advantageous, for example, with respect to the radiation load on the optical elements.

Positive refractive power in the divergent beam path between an upstream intermediate image and the concave mirror contributes to the capability for the downstream lenses in the beam path and the concave mirror to have small diameters. This applies in particular to the at least one negative lens which is provided in preferred embodiments in the immediate vicinity upstream of the concave mirror and which, in conjunction with the concave mirror, makes a major contribution to the correction of the chromatic longitudinal aberration CHL. If the chromatic longitudinal aberration is corrected in some other way, there is no need for this negative lens.

The insertion of positive refractive power between a field plane upstream of the concave mirror and the concave mirror leads in its own right to a contribution to the image field curvature which is proportional to the strength of the positive refractive power. In order to at least partially compensate for this effect, the concave mirror should have greater curvature than in the absence of the positive refractive power. In order, on the other hand, to keep the aberrations which are introduced by the reflection on the concave mirror as small as possible, it is advantageous for the radiation which strikes the concave mirror to strike it essentially at right angles. When positive refractive power is inserted downstream from the intermediate image, this leads to an increase in the negative refractive power directly upstream of the concave mirror, in order to ensure largely perpendicular radiation incidence by virtue of the scattering effect. The increase in the negative refractive power upstream of the concave mirror can at least partially compensate for the reduction in the CHL correction by reducing the size of the lens diameter in this area, so that good CHL correlation is ensured even with a relatively small mirror diameter.

In preferred embodiments, the first intermediate image is located in the vicinity of a folding mirror, which makes it possible to keep the Etendue of the system small. The field lens can generally be fitted very close to the intermediate image without being adversely affected by the folding mirror, thus allowing effective correction of imaging errors. In particular, the objective parts can be suitably designed in order to ensure that at least the intermediate image which is close to the field lens is subject to severe aberration. This allows particularly effective correction of imaging errors. The effectiveness of the correction can be assisted by designing at least that lens surface of the field lens which faces the intermediate image as an aspherical surface.

In one embodiment, the field lens is arranged geometrically between the concave mirror and at least one folding mirror in a region through which the beam passes twice, in such a manner that a first lens area of the field lens is arranged in the beam path between the object plane and the concave mirror, and a second lens area of the field lens is arranged in the beam path between the concave mirror and the image plane.

The field lens can be arranged such that it is arranged not only in the optical vicinity of an intermediate image plane which is located in the beam path upstream of the concave mirror, but also in the optical vicinity of an intermediate image plane which is located in the beam path downstream from the concave mirror. This results in an arrangement close to the field with respect to two successive field planes, so that a powerful correction effect can be achieved at two points in the beam path.

At least one multiple area lens can be arranged in a region of the projection objective through which the beam passes twice and has a first lens area, through which the beam passes in a first direction, and a second lens area, through which the beam passes in a second direction, with the first lens area and the second lens area not overlapping one another, at least on one side of the lens. This multiple area lens may be used as a field lens. If the footprints of the beam paths do not overlap on at least one of the two lens faces, a multiple area lens such as this allows two lenses which act independently of one another to be geometrically moved to a common point. It is also possible to physically manufacture two lenses which act independently of one another as one lens, specifically as an integral multiple area lens, from one lens blank. A multiple area lens such as this can be clearly distinguished from a conventional lens through which the beam passes twice since, in the case of a multiple area lens of this type its optical effect on the beams which pass through it independently of one another can be influenced by suitable independent shaping of the refractive surfaces of the lens areas independently of one another. Alternatively, a lens arrangement with one or two half-lenses or lens elements can also be arranged at the location of an integral multiple area lens in order to influence the beams as they pass one another, independently of one another.

Projection objectives with geometric beam splitting, an intermediate image and a multiple area lens have been disclosed, for example, in WO 03/052462 A1 from the same applicant. The disclosure in this patent application is included by reference in the content of this description.

The projection objective preferably has an image-side numerical aperture of NA>0.85, and an image-side working distance of A≦10 mm. Projection objectives such as these may be used, if required, or immersion lithography with NA>1. The image-side working distance or the working distance in the image area is the (shortest) axial distance between the exit surface of the objective and the image plane. This working distance in the image area, which is filled with a gas during operation in dry systems, is filled with an immersion medium during operation in immersion systems, with the immersion medium having a refractive index which is relatively high in comparison to that of gas.

It is generally advantageous for the image-side working distance not to fall below a minimum value. In this case, it should be noted that scratches, dirt and inhomogeneities on or in the last optical element can lead to a disturbance of the image if the working distance is too short. A finite working distance of, for example, 1 mm or more can in contrast lead to relatively large sub-apertures (footprints of one specific field point) with the high image-side numerical apertures, so that an averaging effect can occur and any image disturbance is reduced or suppressed.

Particular criteria must be taken into account for the definition of the working distance in the image area in immersion systems. On the one hand, a long working distance results not only in greater radiation losses owing to the normally lower transmission of immersion liquids (in comparison to gases) but also to a greater amount of aberration of the surfaces which are located in the vicinity of the image plane, specifically for spherical aberration. On the other hand, the image-side working distance should be sufficiently large to allow laminar flow of an immersion fluid. It may also be necessary to provide space for measurement purposes and sensors. In preferred embodiments, the image-side working distance is between about 1 mm and about 8 mm, in particular between about 1.5 mm and about 5 mm. When using an immersion fluid between the exit surface and the image plane, preferred embodiments have an image-side numerical aperture of NA≧0.98, with the image-side numerical aperture preferably being at least NA=1.0, or at least NA=1.1. The projection objective is preferably matched to an immersion medium which has a refractive index of n_(I)>1.3 at an operating wavelength.

Very pure water for which n_(I)≈1.43 is suitable as an immersion medium for an operating wavelength of 193 nm. The article “Immersion Lithography at 157 nm by M. Switkes and M. Rothschild, J. Vac. Sci. Technol. B 19(6), November/December 2001, pages 1 et seq proposes immersion liquids based on perfluoropolyethers (PFPE) which are sufficiently transparent for an operating wavelength of 157 nm and are compatible with a number of photoresist materials that are currently used in microlithography. One tested immersion liquid has a refractive index of n_(I)=1.37 at 157 nm.

The optical design also allows use for non-contacting near-field projection lithography. In this case, sufficient light energy can be injected into the substrate to be exposed via a gap which is filled with gas, provided that a sufficiently short image-side working distance is maintained, averaged over time. This should be less than four times the operating wavelength that is used, in particular less than the operating wavelength. It is particularly advantageous for the working distance to be less than half the operating wavelength, for example less than one third, one quarter or one fifth of the operating wavelength. These short working distances allow imaging in the optical near field in which evanescent fields, which exist in the immediate vicinity of the last optical surface of the imaging system, are used for imaging.

The invention thus also covers a non-contacting projection exposure method in which evanescent fields of the exposure light which are located in the immediate vicinity of the exit surface can be used for the lithographic process. In this case, if the working distances are sufficiently short (finite), a light component which can be used for lithography can be emitted from the exit surface of the objective, and can be injected into an entry surface, which is immediately adjacent at a distance, despite geometrical total internal reflection conditions on the last optical surface of the projection objective.

Embodiments for non-contacting near-field projection lithography preferably use typical working distances in the region of the operating wavelength or less, for example between about 3 nm and about 200 nm, in particular between about 5 nm and about 100 nm. The working distance should be matched to the other characteristics of the projection system (characteristics of the projection objective close to the exit surface, characteristics of the substrate close to the entry surface) so as to achieve an input efficiency of at least 10%, averaged over time.

A method for production of semiconductor components and the like is thus possible within the scope of the invention, in which a finite working distance is set between an exit surface for exposure light which is associated with the projection objective and an entry surface for exposure light which is associated with the substrate, with the working distance within an exposure time interval being set, at least at times, to a value which is less than a maximum extent of an optical near field of the light emerging from the exit surface.

Use as a dry objective is also possible, if required, with minor modifications. Dry objectives are designed such that a gap which is filled with gas is produced during operation between the exit surface of the projection objective and the entry surface of an object to be exposed, for example a wafer, with this gap width typically being considerably greater than the operating wavelength. The achievable numerical apertures with systems such as these are restricted to values NA<1, since total internal reflection conditions occur on the exit surface on approaching the value NA=1, preventing any exposure light from being emitted from the exit surface. In preferred embodiments of dry systems, the image-side numerical aperture is NA≧0.85 or NA≧0.9.

The third objective part immediately upstream of the image plane is preferably designed to be purely refractive, and can be optimized in order to produce high image-side numerical apertures (NA). It preferably has a first lens group, which follows the second intermediate image, and has a positive refractive power, a second lens group, which immediately follows the first lens group and has a negative refractive power, a third lens group which immediately follows the second lens group and has a positive refractive power, a fourth lens group which immediately follows the third lens group and has a positive refractive power, and a pupil surface which is arranged in a transitional region from the third lens group to the fourth lens group and in whose vicinity a system diaphragm can be arranged. The third lens group preferably has an entry surface which is located in the vicinity of a point of inflection of a marginal ray height between the second lens group and the third lens group, with no negative lens with any substantial refractive power being arranged between this entry surface and the system diaphragm. There are preferably only positive lenses between this entry surface and the image plane. This allows a material-saving design, with moderate lens diameters.

The last optical element in the projection objective immediately upstream of the image plane is preferably a plano-convex lens with a high spherical or aspherically curved entry surface and an exit surface which is essentially planar. This may be in the form of a plano-convex lens which is virtually hemispherical or is not hemispherical. The last optical element, in particular the plano-convex lens, may also be composed of calcium fluoride in order to avoid problems resulting from radiation-induced density changes (in particular compaction).

The first objective part may be used as a relay system in order to produce a first intermediate image, with a predetermined correction state at a suitable position, from the radiation coming from the object plane. The first objective part is generally purely refractive. In some embodiments, at least one folding mirror is provided in this first objective part, which images the object plane to form a first intermediate image, such that the optical axis is folded at least once, and preferably no more than once, within the objective part which is closest to the object.

In some embodiments, the first objective path is a catadioptric objective part with a concave mirror and an associated folding mirror, which may be used as the first folding mirror for the overall projection objective.

The provision of at least two catadioptric subsystems has major advantages. In order to identify significant disadvantages of systems with only one catadioptric subsystem, it is necessary to consider how the Petzval sum and the chromatic aberrations are corrected in a catadioptric part. The contribution of a lens to the chromatic longitudinal aberration CHL is proportional to the square of the marginal ray height h, to the refractive power φ of the lens, and to the dispersion v of the material. On the other hand, the contribution of a surface to the Petzval sum depends only on the surface curvature and of the sudden change in the refractive index (which is −2 in the case of a mirror in air).

In order to allow the contribution of the catadioptric group to the chromatic correction to become large, large marginal ray heights (that is to say large diameters) are thus required, and large curvatures are required in order to allow the contribution to the Petzval correction to become large (that is to say small radii, which are best achieved with small diameters). These two requirements are contradictory.

The contradictory requirements based on Petzval correction (that is to say correction of the image field curvature) and chromatic correction can be solved by introduction of (at least) one further catadioptric part into the system. Since the first catadioptric objective part can be designed such that both the image field curvature and the chromatic longitudinal aberration can be largely or completely corrected, the first intermediate image may have a defined correction state with respect to these aberrations, so that the subsequent objective parts may have an advantageous design.

In one embodiment, the first objective part is a catadioptric objective part with a physical beam splitter, which has a polarization-selective beam splitter surface which is used as a folding mirror and at the same time separates that radiation which leads to the concave mirror of the first objective part from that radiation which is reflected by this concave mirror.

In some embodiments, a concave mirror is provided which is designed as an active mirror, so that the shape of the concave mirror surface can be varied by a suitable drive. This can be used to compensate for various imaging errors.

Some embodiments of projection objectives according to the invention have a crossed beam path at at least one point. For this purpose, they are designed such that a first beam section which runs from the object plane to a concave mirror and a second beam section which runs from the concave mirror to the image plane can be produced, and one folding mirror is arranged with respect to the concave mirror in such a manner that one of the beam sections is folded on the folding mirror, and the other beam section passes through the folding mirror without any vignetting, and the first beam section and the second beam section cross over in a crossing region.

The crossed beam path in the region of a catadioptric objective part, allows projection objectives with a compact and mechanically robust arrangement of the optical components. In this case, a beam path without any vignetting can be achieved, so that no folding mirror intersects a beam which is either reflected on the folding mirror or is passed by the folding mirror without reflection. In this way, only the system diaphragm limits the angular distribution of the rays which contribute to imaging, in an axially symmetrical manner. At the same time, even with the largest numerical apertures, which are associated with large maximum beam diameters and, possibly, highly convergent or divergent beams in the region of the field planes, it is possible to achieve a moderate size for the overall field to be corrected. In this case, the expression “overall field” describes the field area which is enclosed by a minimum circle around the generally rectangular field. The size of the overall field to be corrected increases with the field size and the lateral offset of an axially asymmetric field with respect to the optical axis, and should be minimized in order to simplify the correction process.

Catadioptric projection objectives with a crossed beam path are disclosed, for example, in the U.S. provisional application with the Ser. No. 60/511,673, which was filed on Oct. 17, 2003, or the U.S. patent application with the Ser. No. 10/734,623, which was filed on Dec. 27, 2003, or the U.S. provisional application with the Ser. No. 60/530,622, which was filed on Dec. 19, 2003, by the same applicant. The disclosure content of these patent applications is included by reference in the content of this description.

In preferred embodiments, an off-axis effective object field arranged in the object surface of the projection objective is imaged onto an off-axis effective image field arranged in the image surface of the projection objective. Here, the term “effective object field” relates to the object field which can be effectively imaged by the projection objective without vignetting at a given numerical aperture. The amount of a lateral offset between the effective object field and the first part of the optical axis defined by the first objective part may be characterized by a finite object center height h. Likewise, on the image side of the projection objective, the effective image field is laterally offset with respect to the image side part of the optical axis by a finite image center height h′ related to the object center height h by the magnification ratio β of the projection objective according to h′=|β·h|. In some conventional projection objectives having a refractive first objective part, a catadioptric second objective part, and a refractive third objective part (also denoted type R-C-R) efforts have been made to align the parts of the optical axis defined by the object side refractive objective part and the image side refractive objective part such that no lateral axis offset exists between these parts of the optical axis. However, under these conditions, a finite value of an object-image-shift (OIS) defined between an object field center and an image field center results. Where the object surface and the image surface of the projection objective are parallel to each other, the object-image-shift may be defined as a lateral offset between an object field center axis running parallel to the object side optical axis through the center of the effective object field and an image field center axis running parallel to the image side part of the optical axis through the center of the effective image field. It has been found that small values of object-image-shift may be desirable e.g. if the projection objective is to be incorporated into a projection exposure system designed for scanning operations. Also, measuring techniques used for the qualification of the projection objective may be simplyfied with respect to conventional measuring techniques if small amounts of object-image-shift are obtained. Therefore, in preferred embodiments, the following condition holds:

0≦OIS<|h·(1−|β|)|.

In embodiments obeying this condition, the object-image-shift OIS is smaller than the object-image-shift of designs where the object side part of the optical axis and the image side part of the optical axis are coaxial. In preferred embodiments, no object-image-shift is present such that the condition OIS=0 is fulfilled.

These conditions may be useful in embodiments of the invention having a field lens with positive refractive power arranged between the first intermediate image and the concave mirror in the optical vicinity of the first intermediate image. However, small values for OIS may also be useful for conventional designs having no field lens of this type, such as shown e.g. in WO 2004/019128 A.

Another aspect of the invention enables designing projection objectives having potential for very high image side numerical apertures NA>1.2 or NA>1.3 while at the same time the overall track length (axial distance between object surface and image surface) can be limited to values allowing incorporation of the projection objective in conventional projection exposure systems and, at the same time, allowing to limit the maximum size (diameter) of lenses in the refractive objective parts upstream and/or downstream of a folding mirror. To this end, in preferred embodiments, a refractive power and a position of the field lens is set such that for a first chief ray direction cosine CRA₁ at the first intermediate image the following condition holds:

|CRA1<|β₁*(Y _(OB))/(L _(HOA))|

where β₁ denotes the magnification of the first objective part, Y_(OB) is the object height of the outermost field point for which the chief ray is considered and L_(HOA) is the geometrical distance from the first intermediate image to the concave mirror (length of the horizontal axis). With other words, it may be desirable that the chief ray is telecentric or almost telecentric at a an intermediate image. A chief ray obeying the condition given above will be denoted as an “essentially telecentric chief ray” in the following. Providing an essentially telecentric chief ray at a folding mirror close to such intermediate image allows to limit the size of lenses immediately upstream and/or downstream of the folding mirror. In addition, it has been found that installation space within the third objective part responsible for providing high image side numerical apertures is obtained.

Further, in some embodiments it has been found beneficial for obtaining very high image side numerical apertures if a first axial length AL1 of the first objective part is smaller than a third axial length AL3 of the third objective part, wherein the axial length AL1 is measured between the object plane and an intersection of the optical axis with the first folding mirror and the axial length AL3 is measured between the intersection of the optical axis with the second folding mirror and the image plane. In preferred embodiments, the condition AL1/AL3<0.9, more preferably AL1/AL3<0.8 holds

Systems according to the invention can preferably be used in the deep UV band, for example at 248 nm, 193 nm or 157 nm, or less.

These features and further features are evident not only from the claims but also from the description and the drawings, in which case the individual features can be implemented in their own right or together in the form of subcombinations of embodiments of the invention, and in other fields, and can represent advantageous embodiments, as well as embodiments which are worthy of protection in their own right.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a schematic illustration of a projection exposure system for immersion lithography with one embodiment of a catadioptric projection objective according to the invention;

FIG. 2 shows a schematic illustration of the design of preferred embodiments of projection objectives according to the invention, with a refractive first objective part, a catadioptric second objective part, and a refractive third objective part;

FIG. 3 shows a lens section through a first embodiment of a projection objective according to the invention;

FIG. 4 shows a lens section through a second embodiment of a projection objective according to the invention;

FIG. 5 shows a schematic illustration of the design of one embodiment of a projection objective according to the invention, with a different folding geometry and a crossed beam path;

FIG. 6 shows a schematic illustration of one embodiment of a projection objective according to the invention, with a catadioptric first objective part, a catadioptric second objective part and a refractive third objective part;

FIG. 7 shows a lens section for one embodiment of a catadioptric first objective part with a physical beam splitter, which can be used for the design shown in FIG. 6;

FIGS. 8 a-8 e show various mirror arrangements for folding mirrors for projection objectives according to the invention;

FIG. 9 shows a lens section for an embodiment having coaxial first and third objective parts;

FIG. 10 shows a lens section for another embodiment having coaxial first and third objective parts;

FIGS. 11 a-11 b: FIG. 11 a shows a lens section through an embodiment having laterally offset first and third objective parts such that there is no object-image-shift (OIS), whereas FIG. 11 b illustrates the conditions therefore;

FIG. 12 shows a lens section through a reference system having no field lens;

FIG. 13 shows a lens section through an embodiment having an essentially telecentric chief ray at the folding mirrors;

FIGS. 14 a-14 b: FIG. 14 a shows a schematic drawing illustrating the trajectories of the chief ray in a conventional system; FIG. 14 b shows a schematic drawing illustrating the trajectories of the chief ray according to embodiments having an essentially telecentric chief ray at the folding mirrors;

FIG. 15 shows a lens section through another embodiment having essentially telecentric chief rays at the folding mirrors and a field lens geometrically close to the folding mirrors, where the field lens is optically situated both in the first objective part and in the third objective part;

FIG. 16 shows a lens section of an embodiment having a field lens further apart from the folding mirrors optically within the catadioptric, second objective part and having NA=1.30; and

FIG. 17 shows a variant of the projection objective of FIG. 16 having NA=1.35.

In the following description of preferred embodiments, the expression “optical axis” means a straight line or a sequence of straight line sections through the centers of curvature of the optical components. The optical axis is folded on folding mirrors (deflection mirrors) or on other reflective surfaces. Directions and distances are described as being on the “image side” when they are directed in the direction of the image plane or of the substrate which is located there and is to be exposed, and as on the “object side” when they are directed toward the object plane or toward a reticle located there, with respect to the optical axis. The object in the examples is a mask (reticle) with the pattern of an integrated circuit, although it may also be a different pattern, for example a grating. The image in the examples is projected onto a wafer which is provided with a photoresist layer and is used as a substrate. Other substrates, for example elements for liquid crystal displays or substrates for optical gratings, are also possible.

FIG. 1 shows, schematically, a microlithographic projection exposure system in the form of a wafer stepper 1, which is intended for production of large-scale integrated semiconductor components by means of immersion lithography. The projection exposure system 1 has an excimer laser 2 as the light source, with an operating wavelength of 193 nm, although other operating wavelengths, for example 157 nm or 248 nm, are also possible. A downstream illumination system 3 produces a large, sharply constricted, highly homogeneously illuminated illumination field, which is matched to the telecentric requirements of the downstream projection objective 5 on its exit plane 4. The illumination system 3 has devices for selection of the illumination mode and, in the example, can be switched between conventional illumination with a variable coherence degree, annular field illumination and dipole or quadrupole illumination.

A device 40 (reticle stage) for holding and manipulating a mask 6 is arranged behind the illumination system in such a way that it is located on the object plane 4 of the projection objective 5, and can be moved in a departure direction 7 (y direction) on this plane, for scanning purposes.

The plane 4, which is also referred to as the mask plane, is followed by the catadioptric reduction objective 5, which images an image of the mask on a reduced scale of 4:1 on a wafer 10 which is covered with a photoresist layer. Other reduction scales, for example 5:1, 10:1 or 100:1 or more, are likewise possible. The wafer 10 which is used as a light-sensitive substrate, is arranged such that the planar substrate surface 11 together with the photoresist layer essentially coincides with the image plane 12 of the projection objective 5. The wafer is held by a device 50 (wafer stage) which comprises a scanner drive in order to move the wafer synchronously with the mask 6 and parallel to it. The device 50 also has manipulators, in order to move the wafer both in the z direction parallel to the optical axis 13 of the projection objective and in the x and y directions at right angles to this axis. A tilting device is integrated, and has at least one tilting axis which runs at right angles to the optical axis 13.

The device 50, which is provided for holding the wafer 10, is designed for use for immersion lithography. It has a holding device 15, which can be moved by a scanner drive and whose base has a flat depression or recess for holding the wafer 10. A flat liquid-tight holder, which is open at the top, for a liquid immersion medium 20 is formed by a circumferential rim 16, and the immersion medium 20 can be introduced into the holder, and can be carried away from it, by devices that are not shown. The height of the rim is designed such that the filled immersion medium completely covers the surface 11 of the wafer 10, and the exit-side end area of the projection objective 5 can be immersed in the immersion liquid between the objective exit and the wafer surface while the working distance is set correctly. The entire system is controlled by a central computer unit 60.

FIG. 2 schematically illustrates one preferred embodiment of projection objectives according to the invention. The projection objective 200 is used to image a pattern (which is arranged on its object plane 201) of a mask on a reduced scale on its image plane 202, which is aligned parallel to the object plane, on a reduced scale. It has a first, refractive objective part 210, which images the object field to form a first, real intermediate image 211, a second, catadioptric objective part 220, which images the first intermediate image to form a second real intermediate image 221, and a third, refractive objective part 230, which images the second intermediate image on a reduced scale on the image plane 202. The catadioptric objective part 220 has a concave mirror 225. A first folding mirror 213 is arranged in the vicinity of the first intermediate image, at an angle of 45° to the optical axis 204, such that it reflects the radiation coming from the object plane in the direction of the concave mirror 225. A second folding mirror 223, whose planar mirror surface is aligned at right angles to the planar mirror surface of the first folding mirror, reflects the radiation coming from the concave mirror 225 in the direction of the image plane 202.

The folding mirrors 213, 223 are each located in the optical vicinity of the intermediate images, so that the light conductance value can be kept low. The intermediate images, that is the entire region between the paraxial intermediate image and the marginal ray intermediate image, are preferably not located on the mirror surfaces, thus resulting in a finite minimum distance between the intermediate image and the mirror surface, so that any faults in the mirror surface, for example scratches or impurities, are not imaged sharply on the image plane. The minimum distance should be set such that sub-apertures of the radiation, that is to say footprints of beams which originate from a specific field point or converge on it do not have a diameter of less than 5 mm, or 10 mm, on the mirror surface. Embodiments exist in which both the first intermediate image 211, that is to say the second intermediate image 221 as well, are located in the geometric space between the folding mirrors and the concave mirror 225 (solid arrows). This side arm is also referred to as the horizontal arm (HOA). In other embodiments, the first intermediate image 211′ may be located in the beam path upstream of the first folding mirror 213, and the second intermediate image 221′ may be located in the beam path downstream from the second folding mirror (arrows represented by dashed lines).

The folding angles in this exemplary embodiment are exactly 90°. This is advantageous for the performance of the mirror layers of the folding mirrors. Deflections by more or less than 90° are also possible, thus resulting in an obliquely positioned horizontal arm.

All of the objective parts 210, 220, 230 have a positive refractive power. In the schematic illustration, lenses or lens groups with a positive refractive power are represented by double-headed arrows with points pointing outwards, while lenses or lens groups with a negative refractive power are, in contrast, represented by double-headed arrows with heads pointing inwards.

The first objective part 210 comprises two lens groups 215, 216 with a positive refractive power, between which a possible diaphragm position exists where the chief ray 203, which is shown by a solid line, intersects the optical axis 204, which is shown by a dashed-dotted line. The optical axis is folded through 90° at the first folding mirror 213. The first intermediate image 211 is produced in the light path immediately downstream from the first folding mirror 213.

The first intermediate image 211 acts as an object for the subsequent catadioptric objective part 220. This has a positive lens group 226 close to the field, a negative lens group 227 close to the diaphragm, and the concave mirror 225 which is arranged immediately downstream from this and images the first intermediate image to form the second intermediate image 221. The lens group 226, which has a positive effect overall, is used as a “field lens” and is formed by a single positive lens, whose effect can also be produced, however, by two or more individual lenses with a positive refractive power overall. The negative lens group 227 comprises one or more lenses with a negative effect.

The second intermediate image 221, which is located optically immediately in front of the second folding mirror 223, is imaged by the third refractive objective part 230 on the image plane 202. The refractive objective part 230 has a first positive lens group 235, a second negative lens group 236, a third positive lens group 237 and a fourth positive lens group 238. There is a possible diaphragm position between the positive lens groups 237, 238, where the chief ray intercepts the optical axis.

FIG. 3 shows a lens section through a projection objective 300 which is essentially formed using the principles explained with reference to FIG. 2. Identical or corresponding elements or element groups are annotated with the same reference symbols as in FIG. 2, increased by 100.

One special feature of the system is that a biconvex positive lens 326, through which the beam passes in two opposite directions, is provided geometrically between the folding mirrors 313, 323 and the concave mirror 325 in a region of the projection objective through which the beam passes twice, with the beam passing through it both in the light path between the first intermediate image 311 and the concave mirror 325 and in the light path between the concave mirror and the second intermediate image 321, or the image plane 302, in mutually offset lens areas. The positive lens 326 is arranged closer to the folding mirrors 313, 323 than to the concave mirror 325, in particular in the first third of the axial distance between the folding mirrors and the concave mirror. In the region of the positive lens 326, the marginal ray height is small in comparison to the chief ray height, with the ratio of the marginal ray height to the chief ray height being approximately 0.3. The positive lens 326 is thus arranged close to the field both with respect to the first intermediate image 311 and with respect to the second intermediate image 321, and thus acts as a field lens for both intermediate images. The positive refractive power in the light path between the first intermediate image 311 and the concave mirror 325 ensures, inter alia, that the diameters of the subsequent lenses 327 and of the concave mirror 325 can be kept small. The positive refractive power in the light path from the concave mirror to the second intermediate image 321 and to the image plane results in a reduction in the incidence angle bandwidth of the radiation which also arrives at the second folding mirror 323 and can thus be coated with advantageous reflection layers, as well as for limiting the lens diameters in the refractive objective part 330 which is closest to the image field and is essentially responsible for production of the high image-side numerical aperture (NA=1.20) of the immersion projection objective.

The positive lens can be moved very close to the two intermediate images when required, without being impeded by the folding mirrors, so that a strong correction effect is possible. The positive refractive power which is arranged close to the field allows the horizontal arm to be longer. Because of the large aperture in the first intermediate image 311, the length of the horizontal arm would normally be shortened, so that the diameter of the concave mirror 325 and of the negative meniscus lenses in the negative group 327 which are arranged immediately upstream of it is linked to the color correction and should therefore not be indefinitely large. The inclusion of a positive lens group 326 close to the field also increases the refractive power of the negative lenses 327, owing to the compensation for the Petzval curvature (in comparison to the concave mirror), and thus increases the correction of the color longitudinal error for relatively small diameters in the area of the concave mirror. The catadioptric objective part can thus be designed to be compact and with relatively small lens dimensions, with adequate color correction.

The field lens 326 which is arranged in the immediate vicinity of two intermediate images 311, 321 also has major advantages with respect to optical correction, as will be explained in more detail in the following text. In principle, it is advantageous for the correction of imaging errors to have optical surfaces in the vicinity of intermediate images which are subject to major aberrations. The reason for this is as follows: at a long distance from the intermediate image, for example in the vicinity of the system diaphragm or its conjugate planes, all of the opening rays in a light beam have a finite and monotonally rising height with the pupil coordinate, that is to say an optical surface acts on all the opening rays. Opening beams which are located further outwards at the pupil edge also have an increasingly greater height on this surface (or more correctly: an increasing distance from the chief ray).

However, this is no longer the case in the vicinity of an intermediate image which is subject to severe aberrations. If one is, in fact, located within the caustic of the intermediate image, then it is possible for the surface to be located approximately in or close to the marginal ray image, that is to say effectively it does not act on the marginal rays, but has a considerable optical effect on the zone rays. It is thus possible, for example, to correct a zone error in the optical aberrations. This principle may be used, for example, in order to deliberately influence the spherical zone error.

The convex lens surface of the positive lens 326 which faces the intermediate images 311, 321 and is arranged in their immediate proximity is aspherically curved. In conjunction with the arrangement close to the field, this allows a very major corrective effect to be achieved.

At least the two to three lenses closest to the image can be manufactured from calcium fluoride, in order to avoid compaction problems. In order to compensate for intrinsic birefringence, the crystallographic major axes of the lenses can be rotated with respect to one another. The concave mirror 325 may also be in the form of an active mirror, in which the shape of the mirror surface can be varied by means of suitable manipulators. This can be used to compensate for various imaging errors. The beam path in the vicinity of at least one of the intermediate images is virtually telecentric.

Table 1 shows the specification of the design in tabular form. In this case, column 1 shows the number of the surface which is refractive, reflective or is distinguished in some other way, column 2 shows the radius r of the surface (in mm), column 3 shows the distance d between the surface and the subsequent surface (in mm), column 4 shows the material of a component, and column 5 shows the optically useable free diameters of the optical components (in mm). Reflective surfaces are annotated by “R” in column 1. Table 2 shows the corresponding aspherical data, with the arrow heights of the aspherical surfaces being calculated using the following rule:

p(h)=[((1/r)h ²/(1+SQRT(1−(1+K)(1/r)² h ²))]+C1*h ⁴ +C2*h ⁶+ . . .

In this case, the reciprocal (1/r) of the radius indicates the surface curvature at the surface apex, and h indicates the distance between the surface point and the optical axis. The arrow height is thus p(h), that is to say the distance between the surface point and the surface apex in the z direction, that is to say in the direction of the optical axis. The constants K, C1, C2, etc. are shown in Table 2.

The immersion objective 300 is designed for an operating wavelength of about 157 nm, at which the calcium fluoride which is used for all of the lenses has a refractive index of n=1.5593. This is matched to a perfluoropolyether (Fomblin®) which is used in vacuum technology, as an immersion medium for which n_(I)=1.37 at 157 nm, and has an image-side working distance of about 1.5 mm. The image-side numerical aperture NA is 1.2, and the imaging scale reduction factor is 4:1. The system is designed for an image field whose size is 26×5.0 mm², and it is double telecentric.

FIG. 4 shows a lens section through a projection objective 400 which represents a variant of the embodiment shown in FIG. 3 and is likewise formed using the principles explained with reference to FIG. 2. Identical or corresponding elements or element groups are annotated with the same reference symbols as in FIG. 3, increased by 100. The specifications for this exemplary embodiment are shown in Tables 3 and 4.

In this embodiment as well, a biconvex positive lens 426 which is used as a field lens is arranged in the horizontal arm in the immediate optical vicinity of the intermediate images 411, 421 which are arranged between the folding mirrors 413, 423 and the concave mirror 425, thus resulting in the horizontal arm having small dimensions and on the other hand in a major corrective effect to the intermediate images.

A further special feature of this embodiment is the design of the third, refractive objective part 430, which has a particularly compact configuration, with small dimensions and a small maximum diameter. The basic design with an initial positive group 435, followed by the negative group 436 and two subsequent positive groups 437, 438 with an aperture diaphragm (aperture stop) A in between corresponds to the design shown in FIG. 3. The entry surface E of the third lens group 437 is located behind the biconcave negative lens 436, which is the only lens in the second lens group 436, in the area of maximum divergence of the beam diameter and in the area of a point of inflection of the marginal ray height. There are no negative lenses with a scattering effect that is significant for the optical design between this entry surface and the aperture diaphragm A, or between the aperture diaphragm and the image plane. In particular, only positive lenses are provided between the entry surface E and the image plane.

If there are no negative lenses with a significant refractive power in the region in which the beam diameter is relatively large then this allows the maximum diameters of the lenses to be limited to practicable sizes in this region. “Relatively large beam diameter” for the purposes of this application occur in particular when the marginal ray height on a lens is at least as large as half the marginal ray height at a potential diaphragm position, for example at the system diaphragm. This measure takes account of the fact that the scattering effect of a negative lens may admittedly be desirable for correction reasons, but that any scattering effect downstream from the negative lens has a tendency to lead to larger lens diameters than will be necessary in the absence of a negative lens. Furthermore, the rays of the beam are joined together in the direction of the downstream image plane, and positive refractive power is required for this purpose. The positive lenses which are required for this purpose may overall be designed relatively moderately provided that there is also no need to compensate for the scattering effect of negative lenses in the combination of the beams. Furthermore, the number of lenses may be limited. The invention thus allows compact projection objectives with minimal lens dimensions.

FIG. 5 shows one embodiment of a projection objective 500 which, from the optical point of view, is designed on the basis of the principles explained with reference to FIG. 2. Identical or corresponding elements or element groups are annotated with the same reference symbols as in FIG. 2, increased by 300.

A comparison between the beam profiles in the systems shown in FIG. 2 and FIG. 5 shows that different beam paths are possible within the scope of the invention. An uncrossed beam path is shown in the system in FIG. 2, since a first beam section which runs from the object plane to the concave mirror 225 and a second beam section which runs from this concave mirror to the image plane do not intersect anywhere. The embodiment shown in FIG. 5, in contrast, has a crossed-over beam path. The first folding mirror 513 is arranged on the side of the optical axis 504 facing away from the second folding mirror 523, with the second folding mirror being geometrically located closer to the object plane. In consequence, a first beam section 540 which runs from the object plane 501 to the concave mirror 525 and a second beam section 550 which runs from the concave mirror 525 via the second folding mirror 523 to the image plane cross over in the region immediately upstream of the mirror surface of the second folding mirror 523, in the vicinity of the intermediate images 511, 521. In this case, the second intermediate image 521 is located optically immediately before the second folding mirror 523, and geometrically in the vicinity of an inner mirror edge 528, which faces the optical axis 504, of the first folding mirror. This crossed beam path, in which the radiation is “forced by” the first folding mirror without any vignetting in the direction of the second folding mirror, in the region of the inner mirror edge 528, allows optimization of the light conductance value of the system. It also provides more physical space for the two folding mirrors.

In this embodiment as well, the positive field lens group 526 is located in the optical vicinity of both intermediate images, geometrically between the folding mirrors and the concave mirror, although the second folding mirror and the second intermediate image are somewhat further away from the positive lens 526.

One embodiment of a projection objective 600 will be explained with reference to FIG. 6, in which a pattern which is arranged on its object plane 601 is imaged on an image plane 602 aligned parallel to the object plane, generating two real intermediate images 611, 621. The projection objective has a first, catadioptric objective part 610 which produces a first real intermediate image 611 of the object field, a subsequent, catadioptric second objective part 620, which images the first intermediate image to form a second real intermediate image 621, and a subsequent third, refractive objective part, which images the second intermediate image 621 directly, that is to say without any further intermediate image, on the image plane 602.

One major difference from the embodiments described so far is that the first objective part 610 is a compact catadioptric subsystem. The catadioptric objective part 610 has a concave mirror 615 whose optical axis is at right angles to the object plane, and a polarization-selective beam splitter 660 (Beamsplitter Cube, BSC) which is arranged between the object plane and the concave mirror and has a planar beam splitter surface 613 which is inclined at 45° to the optical axis 604 and is used as a first folding mirror for the projection objective 610. A λ/4 plate 661, a first positive group 662, a second positive group 663, the beam splitter 660, a further λ/4 plate 664 and a negative group 665 arranged immediately in front of the concave mirror are arranged in this sequence between the object plane and the concave mirror. This is followed by a further λ/4 plate 666 and a positive group 667 in the beam path downstream from the folding mirror 613. The basic configuration of the second, catadioptric objective part 620 with a positive group 626 close to the field corresponds essentially to the basic design shown in FIG. 2. The third, refractive objective part has only positive groups between which a diaphragm position is located.

In this exemplary embodiment, folding thus takes place within the first, catadioptric objective part, with positive refractive power in the form of at least one positive lens 667 being arranged between the folding mirror 613, which is responsible for this, and the first intermediate image 611, which is produced by the first subsystem. The overall system is operated with circularly polarized input light, which is converted by the first λ/4 plate to linear-polarized radiation, which is p-polarized with respect to the obliquely positioned beam splitter layer 613 and thus essentially completely passes through it to the concave mirror 650. The λ/4 plate which is arranged between the beam splitter layer and the concave mirror is passed through twice by the linear-polarized radiation and in the process rotates the polarization preferred direction through 90° such that the radiation arriving from the concave mirror at the polarization splitter layer 613 is s-polarized with respect to this, and is reflected in the direction of the subsequent objective parts. The third λ/4 plate 666 converts the radiation to circularly polarized radiation, which then passes through the subsequent subsystems.

Since the first, catadioptric objective part 610 can be designed such that, in conjunction with the mirror curvature and the negative refractive power upstream of the mirror, it can largely or completely correct both the image field curvature and the chromatic longitudinal aberration, the subsequent partial objectives are not loaded, or are only slightly loaded, by these imaging errors. Furthermore, this arrangement allows the physical space between the object plane and the horizontally aligned, catadioptric objective part 620 to be enlarged, which can be used in order to reduce the light conductance value.

The aperture diaphragm A is preferably arranged in the third objective part 630, which is closest to the image, where the chief ray intersects the optical axis. Two further possible diaphragm positions are shown in the first and second objective part, in each case close to the concave mirrors 615, 625.

The first objective part may be physically compact. FIG. 7 shows an embodiment of a catadioptric subsystem which can be used as the first objective part 610 for the system shown in FIG. 6, and whose specification is shown in Table 5. Identical or corresponding elements or element groups are annotated with the same reference symbols as in FIG. 6, increased by 100. All the lenses are spherical, and all the transparent components including the beam splitter block 760 are composed of synthetic quartz glass.

FIGS. 8 a-8 e show various implementation options, schematically, for the folding mirrors which are provided for folding the beam path. The folding mirrors may, for example, be in the form of free-standing planar mirrors, in particular as front surface mirrors (FIGS. 8 a and 8 b). In this case, in the embodiments shown in FIG. 2, separate mirrors as shown in FIG. 8 b can be held jointly, as well. The folding mirrors may also be in the form of free-standing prisms, as shown in FIGS. 8 c and 8 d. The reflective prism surfaces may, if required, act as total internal reflection surfaces depending on the incidence angles that occur on them, or may have a reflection coating. In particular for the embodiments shown in FIGS. 2 to 4, the mirrors may also be in the form of reflective outer surfaces of a mirror prism as shown in FIG. 8 e.

In FIG. 9 a further embodiment of a projection objective 900 having R-C-R-type as explained in connection with FIG. 2 is shown. Reference is made to that description for the basic construction. A first, refractive objective part 910 is designed to image an off-axis effective object field OF arranged in the object surface 901 onto a first intermediate image 911. A first planar folding mirror 913 is arranged within the first objective part immediately upstream of the first intermediate image. A second, catadioptric objective part 920 including a concave mirror 925 is designed for imaging the first intermediate image into a second intermediate image 921 positioned immediately upstream of a second folding mirror 923 at a distance therefrom. A third, refractive objective part 930 including a freely accessible aperture stop AS is designed to image the second intermediate image onto the image surface 902, where an effective image field IF arranged outside the optical axis is created. The first objective part 910 serves as a relay system to place the first intermediate image close to the first folding mirror 913. The catadioptric second objective part 920 includes a single positive lens (field lens 926) geometrically close to the folding mirrors and optically close to both intermediate images, thereby allowing efficient correction of field related imaging errors. The third objective part serves as a focussing lens group providing the major part of the reduction ratio of the projection objective to obtain the image side numerical aperture, which is NA=1.20 in this embodiment at a field size of 26 mm·5.5 mm of the effective object field OF. The overall track length (axial distance between object surface 901 and image surface 902) is 1400 mm. The wavefront aberration is about 4 mλ rms. The specification is given in tables 9, 9A. The chief ray CR of the imaging is drawn bold to facilitate following trajectory of the chief ray.

The lenses of the first objective part 910 define a first part OA1 of the optical axis, which is the axis of rotational symmetry of the lenses and is perpendicular to the object surface 901. The axis of rotational symmetry of the concave mirror 925 and the lenses of the second objective part define a second part OA2 of the optical axis which, in this embodiment, is aligned perpendicular to the object side first part OA1 of the optical axis. With other words, the optical axis is folded by the first folding mirror 913 at 90°. The lenses of the third objective part 930 define a third part OA3 of the optical axis, which is parallel to the first part OA1 of the optical axis and perpendicular to the image surface 902. In this embodiment, the object-side first part OA1 of the optical axis and the image-side third part OA3 of the optical axis are coaxial such that no lateral axis offset exists between these parts of the optical axis. This construction may be desirable with regard to mounting of the lenses of the refractive objective parts. A similar construction with coaxial first and third parts OA1, OA3 of the optical axis is shown as projection objective 1000 in FIG. 10. The specification of that design is given in table 10, 10A. In both embodiments a finite value for the object-image-shift OIS exists.

In the projection objective 900 the lens surface ASP immediately upstream of the first folding mirror 913 is an aspheric surface, which is optically close to the first intermediate image. Efficient correction of field related imaging errors are obtained. In the projection objective 1000 the field lens 1026 has an aspheric lens surface ASP facing the concave mirror. This aspheric surface is the lens surface closest to both the first and second intermediate image 1011, 1021 and therefore very effective for correction at two positions along the beam path. The wave front aberration of this design is about 3 mλ rms.

The embodiment of a projection objective 1100 shown in FIG. 11 a (specification in tables 11, 11A) is an example to demonstrate that practical advantages can be obtained in preferred embodiments if a lateral axis offset AO between the first part OA1 of the optical axis on the object side and a third part OA3 of the optical axis on the image side is adjusted appropriately. In order to facilitate understanding of the terms used in the following, FIG. 11 b shows a schematic drawing where important features and parameters are shown.

From an optical point of view, an off-axis effective object field OF is imaged by the first objective part 1110 into a first intermediate image 1111 arranged between a first folding mirror 1113 and a positive field lens 1126 of the second objective part 1120. The second objective part includes the concave mirror 1125 and is designed as an imaging subsystem to create a second intermediate image 1121 positioned between positive lens 1126 and a second folding mirror 1123. The third objective part 1130 serves as a focussing group to generate the off-axis effective image field IF at a very high image-side numerical aperture NA, wherein here NA=1.30.

In contradistinction to the embodiments of FIGS. 9 and 10 the folding prism forming with perpendicular planar faces the first and second folding mirrors is used asymmetrically, whereby a lateral axis offset AO is obtained between the first part OA1 of the optical axis on the object side and the third part OA3 of the optical axis on the image side (see FIG. 11 b). In this particular embodiment the axis offset AO is set in such a way that an object field center axis OFCA running parallel to the first part OA1 of the optical axis through the object field center and an image field center axis IFCA running through the center of the image field IF and parallel to the third part OA3 of the optical axis coincide (are coaxial). With other words, there is no object-image-shift (OIS) between the centers of the effective object field OF and image field IF. This property is usually not obtained in catadioptric projection objectives with off-axis object field, but only in projection objectives having an effective object field centered around the optical axis (e.g. purely refractive objectives or catadioptric objectives having a physical beam splitter or objectives with pupil obscuration). As evident from FIG. 11 b the amount of lateral axis offset AO is to be set such that the sum of the lateral axis offset AO and an image field center height h′ is equal to the object field center height h if OIS=0 is desired. In that case:

|AO|=|h*(1+|β|)|.

Another beneficial aspect of preferred embodiments of the invention relates to an appropriate selection of positive refractive power for the field lens. As will be demonstrated examplarily in the following, a proper selection of refractive power allows to manufacture projection objectives with very high image side numerical apertures, such as NA=1.3 or NA=1.35, while maintaining a maximum size of lenses upstream and/or downstream of the folding mirrors and the overall track length of the projection objective moderate. For demonstration purposes, FIG. 12 shows a variant of a prior art projection objective of type R-C-R as shown in WO 2004/019128 having an image side numerical aperture NA=1.25 and 1250 mm track length, which is smaller than the track length of the related prior art objective (1400 mm, FIG. 19 in WO 2004/019128 A1). There is no field lens geometrically between the folding mirrors and the concave mirror.

For comparison, FIG. 13 shows a projection objective 1300 as an embodiment of the invention, having the same numerical aperture (NA=1.25) and track length (1250 mm), where a positive field lens 1326 is positioned geometrically between the folding mirrors 1313, 1323 and the concave mirror 1325. To facilitate comparison, schematic FIGS. 14 a-14 b show a prior art system without field lens in FIG. 14 a and an embodiment of the invention including a field lens FL in FIG. 14 b. The trajectory of a chief ray CR is drawn and bold in FIGS. 12 and 13 and also outlined in FIGS. 14 a-14 b where, in addition, the trajectory of a marginal ray MR is shown.

Next, some characteristic features of prior art systems related to the embodiment of FIG. 12 are summarized using the reference identifications of FIG. 14 a. The first objective part is a refractive relay group L1 designed to create the first intermediate image IMI1 close to the first folding mirror FM1 of the folding prism. An axially compact (short) catadioptric second objective part including the concave mirror CM creates the second intermediate image IMI2 close to the second folding mirror FM2. A purely refractive main focussing group L2 formed by the third objective part forms the image.

The first objective part is subdivided into a first lens group LG1 and a second lens group LG2 (each positive refractive power), a pupil surface being positioned between these lens groups where the chief ray CR intersects the optical axis OA. The third objective part includes, in that sequence, a third lens group LG3 with positive refractive power, a fourth lens group LG4 with negative refractive power, and a fifth lens group LG5 with positive refractive power. An image side pupil surface is positioned in the third objective part where the chief ray crosses the optical axis. An aperture stop AS is usually positioned at this position. A pupil surface optically between the first and second intermediate image is positioned close to or at the concave mirror CM.

Alternatively an aperture stop may also be positioned in one of the other pupil surfaces, namely in the refractive relay group L1 or in the catadioptric group, close to the concave mirror.

The chief ray CR is convergent at the first intermediate image IMI1 and the first folding mirror optically close to that intermediate image. Here, a convergent chief ray is a chief ray where the chief ray height CRH, i.e. the radial distance between the chief ray and the optical axis, is decreasing in light propergation direction. On the other hand, the chief ray is divergent (i.e. chief ray height increasing in light propergation direction) at the second intermediate image IMI2 and the second folding mirror.

Due to the folding geometry having the intermediate images between the folding mirrors and the concave mirror, the lenses of the second lens group LG2 and the third lens group LG3 closest to the first intermediate image and the second intermediate image, respectively, are optically relatively far away from the intermediate images since the folding mirror is placed between these lenses and the intermediate images. As a consequence of the convergence/divergence of the chief ray these lenses closest to the folding mirrors have a tendency to become large (large lens diameter). Note that this effect may be weaker if a larger distance is set between the concave mirror and the folding mirrors, thereby forming a longer horizontal arm (HOA) of the objective.

Given these conditions, there is a tendency for the horizontal optical axis to become shorter if the image side numerical aperture NA is to be increased. This can be understood as follows. The primary purpose of the concave mirror is to correct the Petzvalsum (image field curvature) of the projection objective. The contribution of the concave mirror for Petzval sum correction is directly proportional to the curvature of the concave mirror. If the numerical aperture of the system is to be increased and, at the same time, the length of the horizontal arm HOA would remain constant, the diameter of the catadioptric group including the concave mirror would be increased. One potential consequence is that the curvature of the concave mirror would become smaller, whereby the effect of the concave mirror on Petzval sum correction would decrease. This is considered less desirable since the Petzval sum correction must then be provided in other parts of the projection objective, thereby making the design more complicated.

On the other hand, if it desired to maintain the correcting effect of the catadioptric group on Petzval sum correction, the diameter of the catadioptric group including the concave mirror should be maintained essentially constant. This, however, corresponds to a decreasing length of the horizontal arm which, in turn, leads to relatively large chief ray angles at the intermediate images, as shown schematically in FIG. 14 a and in the projection objective 1200 of FIG. 12.

It is evident from FIG. 12 that very large lens diameters are required particularly for the two or three positive lenses of the second lens group LG2 immediately upstream of the first folding mirror.

However, if it is desired to increase the numerical aperture, sufficient space for lenses must be provided in the third objective part, mainly in the vicinity of the closest pupil position next to the wafer. If it is further desired to limit the track length of the objective to reasonable values, it appears that it is desirable to design the first objective part (relay group L1) axially shorter and to decrease the diameters of the lenses immediately upstream of the first folding mirror.

These objects can be obtained by introducing a field lens having sufficient positive refractive power geometrically between the folding mirrors and the concave mirror optically close to the intermediate images, as shown schematically in FIG. 14 b and exemplarily in embodiment 1300 of FIG. 13. As evident from FIG. 13, the positive refractive power provided by a lens 1326 allows to guide the chief ray CR almost parallel to the optical axis or slightly divergent onto the first folding mirror 1313, whereby the diameters of the two or three lenses immediately upstream of the first folding mirror can be substantially reduced when compared to the design of FIG. 12. Also, the first axial length AL1 of the first objective part 1310 is substantially reduced when compared to the corresponding length of the first objective part 1210 in FIG. 12. As a consequence, more space is available in the third objective part for introducing lenses contributing to an increase in numerical aperture. Also, the horizontal arm including the concave mirror is substantially longer and the concave mirror is substantially smaller when a field lens is introduced.

In the embodiment of FIG. 13, it is also evident that both the first and second intermediate image are positioned in a space between the field lens 1326 and the mirror group including the concave mirror 1325. Specifically, an axial distance between the intermediate images and the closest optical surface (lens surface of positive lens 1326 facing the concave mirror) is sufficiently large such that the closest optical surface lies outside an intermediate image space defined axially between the paraxial intermediate image (intermediate image formed by paraxial rays) and the marginal ray intermediate image (formed by marginal rays of the imaging). A minimum distance of at least 10 mm is obtained here. The field lens is effective as a last lens of the first objective part 1310 and as a first lens of the third objective part 1330 (when viewed in light propagation direction at the intended use as reduction projection objective). Therefore, it is worth to note that FIG. 13 shows a projection objective having two refractive imaging subsystems (formed by the first objective part 1310 and the third objective part 1330), where a lens (the field lens 1326) is arranged optically within both the first and the third imaging subsystem. Also, each folding mirror is positioned inside a refractive imaging subsystem between lenses of the respective subsystem.

The embodiments of the following FIGS. 15 to 17 (specifications in tables 15, 15A, 16, 16A and 17, 17A, respectively) are based on the embodiment of FIG. 13 and show exemplarily that a basic design having a field lens with sufficient refractive power allows to obtain even higher image side numerical apertures with moderate lens sizes. The specifications are given in tables 15, 15A, 16, 16A and 17, 17A, respectively.

An image side numerical aperture NA=1.30 is obtained for the projection objective 1500 in FIG. 15. Here, the chief ray CR is almost parallel to the optical axis at the first and second folding mirror. Specifically, a first chief ray direction cosine |CRA1|=0.055 is obtained at the first folding mirror and a second chief ray direction cosine CRA2=0.058 is obtained at the second folding mirror.

In the projection objectives 1300 and 1500, the positive field lens 1326, 1526 in the horizontal arm is arranged very close to the folding mirrors such that intermediate images follow within a space free of optical material between that field lens and the concave mirror. However, as evident from the intersecting lens symbols, one or more truncated lenses must be used close to the folding mirrors, which makes lens mounting more complicated.

Such mounting problem is avoided for the projection objective 1600 in FIG. 16, where the positive field lens 1626 is positioned far away from the folding mirrors 1613, 1623 mostly outside a cylindrical space defined between the lenses immediately upstream and downstream of the folding mirrors. In this embodiment, circular lenses with a stable mounting technique can be used. From an optical point of view, the chief ray angles at the first and second folding mirrors are almost zero (essentially telecentric chief ray). As both intermediate images 1611 and 1621 are positioned essentially between the folding mirrors and the field lens 1626, the field lens is now part of the catadioptric second imaging objective part 1620 including the concave mirror 1625. In this variant, the installation space problem close to the folding mirror is avoided. An image side numerical aperture NA=1.30 is obtained.

The design type has potential for even higher numerical apertures, which is evident from projection objective 1700 shown in FIG. 17 having an image side numerical aperture NA=1.35. Like in the embodiment of FIG. 16, the chief ray is almost telecentric at the folding mirrors and the intermediate images 1711, 1721 are essentially positioned between the folding mirrors and the field lens 1726. The increase in numerical aperture with respect to the embodiment of FIG. 16 shows that in that embodiment sufficient space for further and/or stronger lenses is available in the third objective part responsible for providing the high numerical aperture.

As mentioned earlier, the invention allows to built catadioptric projection objectives with high numerical aperture, particularly allowing immersion lithography at numerical apertures NA>1, that can be built with relatively small amounts of optical material. The potential for small material consumption is demonstrated in the following considering parameters describing the fact that particularly compact projection objectives can be manufactured.

Generally, the dimensions of projection objectives tend to increase dramatically as the image side numerical aperture NA is increased. Empirically it has been found that the maximum lens diameter D_(max) tends to increase stronger than linear with increase of NA according to D_(max)˜NA^(k), where k>1. A value k=2 is an approximation used for the purpose of this application. Further, it has been found that the maximum lens diameter D_(max) increases in proportion to the image field size (represented by the image field height Y′, where Y′ is the maximum distance between an image field point and the optical axis). A linear dependency is assumed for the purpose of the application. Based on these considerations a first compactness parameter COMP1 is defined as:

COMP1=D _(max)/(Y′·NA²).

It is evident that, for given values of image field height and numerical aperture, the first compaction parameter COMP1 should be as small as possible if a compact design is desired.

Considering the overall material consumption necessary for providing a projection objective, the absolute number of lenses, N_(L) is also relevant. Typically, systems with a smaller number of lenses are preferred to systems with larger numbers of lenses. Therefore, a second compactness parameter COMP2 is defined as follows:

COMP2=COMP1·N _(L).

Again, small values for COMP2 are indicative of compact optical systems.

Further, projection objectives according to preferred embodiments of the invention have at least three objective parts for imaging an entry side field surface into an optically conjugate exit side field surface, where the imaging objective parts are concatenated at intermediate images. Typically, the number of lenses and the overall material necessary to build an projection objective will increase the higher the number N_(OP) of imaging objective parts of the optical system is. It is desirable to keep the average number of lenses per objective part, N_(L)/N_(OP), as small as possible. Therefore, a third compactness parameter COMP3 is defined as follows:

COMP3=COMP1·N _(L) /N _(OP).

Again, projection objectives with low optical material consumption will be characterized by small values of COMP3.

Table 18 summarizes the values necessary to calculate the compactness parameters COMP1, COMP2, COMP3 and the respective values for these parameters for each of the systems presented with a specification table (the table number (corresponding to the same number of a figure) is given in column 1 of table 18). Therefore, in order to obtain a compact catadioptric projection objective having at least one concave mirror and at least two imaging objective parts (i.e. at least one intermediate image) at least one of the following conditions (1) to (3) should be observed:

(1) COMP1<11

Preferably COMP1<10.7 should be observed.

(2) COMP2<340

Preferably COMP2<320, more preferably COMP2<300 should be observed.

(3) COMP3<110

Preferably COMP3<100 should be observed.

In some embodiments COMP1<11 and, at the same time, COMP2<340, which allows particularly compact designs.

Another aspect concerns the size of the concave mirror, which is particularly small in relation to the largest lenses in some embodiments, thereby facilitating manufacturing and mounting. In some embodiments the concave mirror has a mirror diameter D_(M), the projection objective has a maximum lens diameter D_(max), and the condition D_(M)<0.75*D_(max) holds. Preferably D_(M)<0.70*D_(max) may be fulfilled.

Table 18 shows that preferred embodiments according to the invention generally observe at least one of these conditions indicating that compact designs with moderate material consumption and/or small concave mirror are obtained according to the design rules laid out in this specification.

The invention has been described in detail using examples of R-C-R type catadioptric projection objectives having a first folding mirror for deflecting the radiation coming from the object plane in the direction of the concave mirror and a second folding mirror for deflecting the radiation coming from the concave mirror in the direction of the image plane. The invention can also be implemented in designs having different folding geometry, for example those where radiation coming from the object plane is directly directed at the concave mirror prior to a reflection on a first folding mirror arranged for deflecting the radiation coming from the concave mirror in the direction of the image plane. In those embodiments, a second folding mirror is usually provided downstream of the first folding mirror to allow a parallel arrangement of object plane and image plane.

It is self-evident that all of the systems described above may be complete systems, that is to say systems for forming a real image (for example on a wafer) of a real object (for example a photolithography mask). The systems may, however, also be used as subsystems for larger systems. For example, the “object” of one of the systems described above may thus be an image which is produced by an imaging system (for example a relay system) positioned upstream of the object plane. An image which is formed by one of the systems described above may likewise be used as an object for a system (for example a relay system) downstream from the image plane. The enumeration of the objective parts with the expressions “first objective part” and “second objective part” etc. relates to the sequence in which the beam passes through them when they are used as a reduction objective. The expressions “first” and “second” etc. should be understood as being relative to one another. The “first” objective part is arranged upstream of the “second” objective part in the direction in which the beam passes through them. This need not necessarily be the first objective part in the overall system, that is to say the objective part which immediately follows the image plane in the system. However, this is the case in the illustrated exemplary embodiments.

TABLE 1 NA = 1.2 Y = 57.7 mm WL 157.2852 157.2862 157.2842 CAF2 1.55930394 1.55930133 1.55930655 IMM 1.37021435 1.37021206 1.37021665 Surface Radius Distance Material ½ Diameter  0 0.000000000 48.029632171 AIR 57.700  1 0.000000000 39.172776328 AIR 72.768  2 −96.971407438 43.719958386 CAF2 74.418  3 −158.002766036 5.165244231 AIR 98.534  4 781.518257267 56.238731708 CAF2 120.188  5 −253.290501301 4.909571912 AIR 123.211  6 288.016848173 49.396794919 CAF2 124.172  7 −435.168087157 26.736905514 AIR 122.368  8 105.910945049 62.394238960 CAF2 94.783  9 178.598362309 79.753912118 AIR 79.042 10 −274.352911686 15.001130830 CAF2 42.116 11 −481.511902624 46.498544862 AIR 46.787 12 −70.442117850 52.555341121 CAF2 55.942 13 −90.455727573 1.806830035 AIR 78.160 14 3232.255140950 36.176140320 CAF2 91.116 15 −186.488036306 1.000000000 AIR 92.734 16 365.731282758 20.809036457 CAF2 90.268 17 −2611.121142850 101.825417590 AIR 88.935 18 0.000000000 0.000000000 AIR 84.274 19 0.000000000 65.181628952 AIR 84.274 20 258.735107311 37.578859051 CAF2 105.187 21 −1152.159158690 288.921175238 AIR 104.969 22 −129.279458408 15.003276235 CAF2 81.991 23 −2262.350961510 56.312694509 AIR 88.341 24 −117.450410520 15.001009008 CAF2 91.957 25 −309.800170740 28.401147541 AIR 113.929 26 R −175.988719829 0.000000000 AIR 117.602 27 R 0.000000000 28.401147541 AIR 168.871 28 309.800170740 15.001009008 CAF2 112.745 29 117.450410520 56.312694509 AIR 87.774 30 2262.350961510 15.003276235 CAF2 78.116 31 129.279458408 288.921175238 AIR 70.315 32 1152.159158690 37.578859051 CAF2 91.290 33 −258.735107311 65.181629067 AIR 91.634 34 0.000000000 0.000000000 AIR 84.438 35 0.000000000 95.566202561 AIR 84.438 36 −385.455042894 15.000000000 CAF2 93.816 37 −452.475904634 1.000000003 AIR 97.482 38 254.248242468 32.034900497 CAF2 105.601 39 5899.473023640 1.000023801 AIR 105.353 40 190.848967014 30.278271846 CAF2 104.456 41 621.351654529 138.920391104 AIR 102.039 42 −123.640610032 33.881654714 CAF2 76.579 43 158.155949669 49.867792861 AIR 80.512 44 412.757602921 47.829461944 CAF2 98.825 45 −208.949912656 17.094373280 AIR 103.896 46 −158.641772839 15.212844332 CAF2 105.038 47 −313.678744542 1.052590482 AIR 118.827 48 −829.528825093 55.527291516 CAF2 125.550 49 −184.492343437 11.796257723 AIR 129.573 50 260.696800337 37.374556186 CAF2 132.314 51 497.808165974 65.844307831 AIR 127.088 STO 0.000000000 0.000000000 AIR 127.776 53 0.000000000 −22.615444914 AIR 128.288 54 358.239917958 44.763751865 CAF2 128.404 55 −739.494996855 1.004833255 AIR 127.649 56 242.528908132 44.488018592 CAF2 121.037 57 3949.584753010 1.000094237 AIR 116.970 58 201.527861764 58.711711773 CAF2 103.897 59 −1366.391075450 1.000007100 AIR 89.104 60 62.439639631 63.828426005 CAF2 55.026 61 0.000000000 1.550000000 IMM 17.302 62 0.000000000 0.000000000 AIR 14.425

TABLE 2 Aspherical constant Surface No. 2 K 0.0000      C1 1.90827109e−008 C2 1.04825601e−012 C3 −1.78093208e−017  C4 2.90254732e−020 C5 −9.28646308e−025  C6 9.92757252e−029 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 7 K 0.0000      C1 4.29834963e−008 C2 −9.32018657e−013  C3 3.88421097e−017 C4 −1.41048066e−021  C5 3.20036532e−026 C6 −2.55377630e−031  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 12 K 0.0000      C1 7.12539594e−008 C2 7.81169353e−012 C3 2.24285994e−016 C4 2.70399434e−019 C5 −5.33658325e−023  C6 1.07824675e−026 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 17 K 0.0000      C1 3.44530878e−008 C2 −3.20209778e−013  C3 4.32090602e−018 C4 3.71891782e−022 C5 −2.41461999e−026  C6 6.86020285e−031 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 20 K 0.0000      C1 5.99206839e−009 C2 −2.26778093e−013  C3 −5.52734742e−019  C4 3.37919534e−022 C5 −2.42416300e−026  C6 5.56746821e−031 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 22 K 0.0000      C1 6.63814399e−008 C2 1.50151781e−012 C3 3.42715896e−017 C4 1.13418489e−020 C5 −1.20800658e−024  C6 1.36760067e−028 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 31 K 0.0000      C1 −6.63814399e−008  C2 −1.50151781e−012  C3 −3.42715896e−017  C4 −1.13418489e−020  C5 1.20800658e−024 C6 −1.36760067e−028  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 33 K 0.0000      C1 −5.99206839e−009  C2 2.26778093e−013 C3 5.52734742e−019 C4 −3.37919534e−022  C5 2.42416300e−026 C6 −5.56746821e−031  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 41 K 0.0000      C1 3.02036913e−008 C2 −8.49897291e−013  C3 −2.62757380e−018  C4 2.42290737e−021 C5 −1.80384886e−025  C6 4.40130958e−030 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 42 K 0.0000      C1 1.57083344e−007 C2 −5.70047014e−012  C3 9.96269363e−016 C4 −9.51074757e−020  C5 2.78023503e−024 C6 2.11268686e−028 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 44 K 0.0000      C1 −6.63114425e−008  C2 1.06389778e−012 C3 −1.73700448e−016  C4 7.83565903e−021 C5 −3.69851418e−025  C6 6.43100123e−031 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 51 K 0.0000      C1 3.97980700e−008 C2 −1.14363396e−015  C3 2.12173627e−019 C4 −1.81177143e−022  C5 −9.65440963e−027  C6 3.69511989e−031 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 59 K 0.0000      C1 3.28933356e−008 C2 −4.67953085e−013  C3 1.96156711e−017 C4 1.01627452e−022 C5 −3.59201172e−026  C6 2.16163436e−030 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000

TABLE 3 NA = 1.1 Y = 57.7 mm WL 157.2852 157.2862 157.2842 CAF2 1.55930394 1.55930133 1.55930655 Surface Radius Distance Material ½ Diameter  0 0.000000000 47.596241819 AIR 57.700  1 0.000000000 21.484078486 AIR 71.361  2 −130.196528296 81.232017348 CAF2 71.411  3 −201.970612192 1.090292328 AIR 102.064  4 0.000000000 43.035190104 CAF2 111.239  5 −219.688636866 1.000008083 AIR 113.511  6 196.835177454 48.645753259 CAF2 112.440  7 −1062.563638620 1.011278327 AIR 109.626  8 102.486371771 51.257817769 CAF2 88.766  9 125.152226832 78.537765316 AIR 72.052 10 −276.036111675 19.246024827 CAF2 35.565 11 −344.559129459 44.417965355 AIR 42.153 12 −73.158562407 46.803238343 CAF2 53.934 13 −81.595671547 1.005611042 AIR 71.774 14 917.859457951 35.862144308 CAF2 83.802 15 −184.688054893 1.002179985 AIR 85.191 16 520.342292054 23.034106261 CAF2 82.478 17 −768.099839930 99.999802859 AIR 80.816 18 0.000000000 0.000000000 AIR 72.928 19 0.000000000 49.999962118 AIR 72.928 20 241.487091044 30.190977973 CAF2 85.575 21 −1164.355916310 264.025266484 AIR 85.757 22 −132.516232462 15.000193519 CAF2 81.831 23 −1356.484422410 61.385058143 AIR 89.265 24 −108.588059874 14.999993604 CAF2 92.698 25 −296.429590341 28.045104017 AIR 119.543 26 R −171.604551151 0.000000000 AIR 121.617 27 R 0.000000000 28.045104017 AIR 187.566 28 296.429590341 14.999993604 CAF2 118.640 29 108.588059874 61.385058143 AIR 87.692 30 1356.484422410 15.000193519 CAF2 75.436 31 132.516232462 264.025266484 AIR 68.614 32 1164.355916310 30.190977973 CAF2 79.925 33 −241.487091044 49.999914356 AIR 79.985 34 0.000000000 0.000000000 AIR 73.069 35 0.000000000 107.612168038 AIR 73.069 36 −693.184976623 16.117644573 CAF2 81.276 37 −696.986438150 2.228062889 AIR 84.557 38 272.001870523 26.851322582 CAF2 90.453 39 −11518.014964700 1.683452367 AIR 90.747 40 204.924277454 41.781211890 CAF2 91.627 41 3033.528484830 106.582128113 AIR 88.228 42 −134.400581416 22.683343530 CAF2 70.595 43 149.085276952 30.111359058 AIR 72.323 44 −1571.459281550 66.592767742 CAF2 74.527 45 −685.256687590 11.096249234 AIR 101.072 46 −661.646567779 85.751986497 CAF2 106.788 47 −157.414472118 1.578582665 AIR 121.872 48 281.442061787 38.097581301 CAF2 126.470 49 2477.671193110 77.916990124 AIR 123.978 50 0.000000000 0.000000000 AIR 117.805 51 0.000000000 −4.224796803 AIR 118.082 52 629.850672554 48.195853438 CAF2 118.380 53 −440.009879814 0.999978780 AIR 118.034 54 243.613408298 52.262412712 CAF2 109.822 55 11973.088705700 1.027491789 AIR 101.920 56 115.269169988 60.712228046 CAF2 83.889 57 372.135519803 1.030688086 AIR 63.468 58 72.776794128 53.208894511 CAF2 48.890 59 0.000000000 0.000000000 CAF2 14.425 60 0.000000000 0.000000000 AIR 14.425

TABLE 4 Aspherical constants Surface No. 2 K 0.0000      C1 −4.90420246e−011  C2 7.22127484e−014 C3 1.72996941e−017 C4 −3.83158229e−021  C5 1.65903133e−024 C6 −1.68929866e−028  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 7 K 0.0000      C1 2.96559302e−008 C2 −4.45892297e−013  C3 1.35851832e−017 C4 −9.75107227e−022  C5 6.40021152e−026 C6 −9.93085086e−031  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 12 K 0.0000      C1 6.82301843e−008 C2 6.13339976e−012 C3 −1.47536226e−016  C4 −7.56092252e−020  C5 1.52586945e−023 C6 −1.35801785e−027  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 17 K 0.0000      C1 4.47108229e−008 C2 −4.00171489e−013  C3 4.13032418e−018 C4 6.29956500e−022 C5 −3.85978221e−026  C6 2.31708241e−030 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 20 K 0.0000      C1 2.82365956e−009 C2 −3.11781699e−013  C3 −1.69631649e−018  C4 1.14900242e−021 C5 −1.52629451e−025  C6 8.81503206e−030 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 22 K 0.0000      C1 6.25856212e−008 C2 9.37857950e−013 C3 3.67635940e−017 C4 8.35698619e−021 C5 −1.33482892e−024  C6 1.38831758e−028 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 31 K 0.0000      C1 −6.25856212e−008  C2 −9.37857950e−013  C3 −3.67635940e−017  C4 −8.35698619e−021  C5 1.33482892e−024 C6 −1.38831758e−028  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. .33 K 0.0000      C1 −2.82365956e−009  C2 3.11781699e−013 C3 1.69631649e−018 C4 −1.14900242e−021  C5 1.52629451e−025 C6 −8.81503206e−030  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 41 K 0.0000      C1 2.31765306e−008 C2 −1.15108202e−012  C3 2.55992541e−017 C4 6.87393928e−022 C5 −3.66676084e−026  C6 −2.77895503e−030  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 42 K 0.0000      C1 1.23211770e−007 C2 −2.94099944e−012  C3 1.13325221e−015 C4 −1.09316744e−019  C5 2.28727473e−024 C6 1.03306617e−027 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 44 K 0.0000      C1 −1.18481725e−007  C2 −2.04738790e−012  C3 −5.33930585e−016  C4 −1.51638014e−020  C5 1.67227571e−024 C6 −4.91365155e−028  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 49 K 0.0000      C1 2.68959500e−008 C2 −9.41267411e−014  C3 2.54969437e−018 C4 −1.50502498e−022  C5 6.35633774e−027 C6 −9.71849339e−032  C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000 Surface No. 57 K 0.0000      C1 3.32050996e−008 C2 4.58821096e−012 C3 −7.80384116e−016  C4 1.16466986e−019 C5 −1.04436731e−023  C6 4.66260861e−028 C7 0.00000000e+000 C8 0.00000000e+000 C9 0.00000000e+000

TABLE 5 NAO = 0.27 Y = 56.08 mm WL 193.3685 193.368 193.3675 SiO22 1.56078491 1.5607857 1.56078649 Surface Radius Distance Material ½ Diameter  0 0.000000000 40.000000000 AIR 56.080  1 700.000000000 30.000000000 SIO2 70.401  2 −700.000000000 1.000000000 AIR 74.095  3 700.000000000 30.000000000 SIO2 75.879  4 −700.000000000 −1.000000000 AIR 77.689  5 500.000000000 30.000000000 SIO2 78.339  6 −1000.000000000 15.000000000 AIR 78.060  7 700.000000000 30.000000000 SIO2 76.609  8 −700.000000000 0.000000000 AIR 74.839  9 0.000000000 75.000000000 SIO2 74.070 10 0.000000000 75.000000000 SIO2 64.964 11 0.000000000 13.000000000 AIR 55.857 12 −300.000000000 10.000000000 SIO2 54.317 13 −500.000000000 5.000000000 AIR 53.682 14 0.000000000 10.000000000 AIR 52.538 15 −290.000000000 0.000000000 AIR 55.162 16 0.000000000 15.000000000 AIR 54.666 17 500.000000000 10.000000000 SIO2 56.801 18 300.000000000 13.000000000 AIR 57.279 19 0.000000000 75.000000000 SIO2 58.589 20 0.000000000 75.000000000 SIO2 66.927 21 0.000000000 30.000000000 AIR 75.266 22 300.000000000 30.000000000 SIO2 82.546 23 −400.000000000 40.000100000 AIR 82.595 24 500.000000000 25.000000000 SIO2 76.453 25 −400.000000000 41.206360088 AIR 74.915 26 0.000000000 0.000000000 AIR 63.567

TABLE 9 SURFACE RADIUS THICKNESS MATERIAL INDEX SEMIDIAM.  0 0.000000 59.209510 64.0  1 6291.598274 23.678332 SILUV 1.560491 85.8  2 −280.600902 1.025405 87.8  3 144.511042 32.290800 SILUV 1.560491 93.4  4 416.821920 57.132926 91.4  5 163.242835 31.337729 SILUV 1.560491 78.6  6 −661.478201 9.882827 75.2  7 85.805375 31.336035 SILUV 1.560491 59.0  8 97.841124 32.157174 46.3  9 −110.558780 50.000185 SILUV 1.560491 43.4 10 −105.568468 7.861299 62.9 11 −95.869843 33.360087 SILUV 1.560491 64.6 12 −396.465160 25.208502 89.8 13 −295.388642 49.666565 SILUV 1.560491 103.3 14 −127.525234 0.999856 109.4 15 −279.794894 36.644817 SILUV 1.560491 118.2 16 −160.830350 0.999370 121.6 17 321.280433 28.683439 SILUV 1.560491 121.8 18 1713.098384 0.999141 120.6 19 249.641678 30.928964 SILUV 1.560491 117.3 20 1775.118866 84.998661 114.7 21 0.000000 −14.998086 REFL 183.2 22 −322.738827 −22.708716 SILUV 1.560491 86.5 23 1794.276655 −198.953288 84.1 24 102.167956 −12.500000 SILUV 1.560491 72.4 25 15297.224085 −58.562725 82.5 26 106.167570 −12.500000 SILUV 1.560491 89.2 27 192.760260 −27.399192 107.8 28 154.038668 27.399192 REFL 115.3 29 192.760260 12.500000 SILUV 1.560491 107.8 30 106.167570 58.562725 89.2 31 15297.224085 12.500000 SILUV 1.560491 82.5 32 102.167956 198.954271 72.4 33 1794.276655 22.708716 SILUV 1.560491 84.1 34 −322.738827 14.999504 86.5 35 0.000000 −84.999766 REFL 179.0 36 665.918045 −20.162556 SILUV 1.560491 112.6 37 332.340267 −0.999827 115.0 38 −545.416435 −30.156611 SILUV 1.560491 121.7 39 972.309758 −0.999891 122.2 40 −239.092507 −40.367741 SILUV 1.560491 122.8 41 −3867.765964 −1.000866 121.0 42 −145.814165 −43.782811 SILUV 1.560491 108.8 43 −475.322286 −20.838629 103.7 44 994.251725 −9.999791 SILUV 1.560491 100.7 45 −102.926902 −38.025955 82.3 46 −666.254624 −9.999917 SILUV 1.560491 82.7 47 −120.991218 −38.125943 83.4 48 −444.529439 −19.995612 SILUV 1.560491 93.9 49 7256.085975 −72.078976 96.0 50 861.320622 −16.316029 SILUV 1.560491 115.4 51 367.114240 −21.532267 118.5 52 −578.781634 −19.544116 SILUV 1.560491 135.3 53 −1539.844110 −1.000064 136.2 54 −409.215581 −53.967605 SILUV 1.560491 140.1 55 388.259251 −21.190519 140.0 56 0.000000 −14.363454 131.6 57 −492.744559 −42.747305 SILUV 1.560491 135.3 58 596.175995 −0.999975 134.4 59 −188.727208 −44.971247 SILUV 1.560491 119.1 60 −1267.900423 −0.999664 114.6 61 −118.853763 −29.974419 SILUV 1.560491 90.5 62 −172.286110 −2.720285 82.2 63 −83.065857 −24.574193 SILUV 1.560491 67.0 64 −111.658319 −1.105096 56.0 65 −69.828581 −43.055955 SILUV 1.560491 50.3 66 0.000000 −1.001571 H2OV193 1.436823 20.5 67 0.000000 0.000000 19.0

TABLE 9A ASPHERIC CONSTANTS SRF 6 15 20 24 K 0 0 0 0 C1 7.168010E−08 −6.564766E−09 1.990247E−08 −1.434139E−07 C2 7.874235E−13 4.352930E−13 2.214975E−13 −3.992456E−12 C3 3.026860E−16 −2.400883E−17 −2.046213E−17 −3.265156E−16 C4 −3.434246E−20 3.866886E−22 9.725329E−22 3.104990E−21 C5 3.870353E−25 1.162444E−27 −2.756730E−26 −1.874174E−24 C6 7.234455E−29 −1.259764E−32 4.143527E−31 −4.628892E−28 SRF 43 45 47 50 K 0 0 0 0 C1 −1.007015E−08 −4.489903E−08 5.184442E−08 3.174451E−08 C2 −3.821558E−13 1.198606E−12 5.582183E−12 5.537615E−14 C3 8.872440E−17 −1.562441E−16 2.393671E−16 3.190712E−18 C4 −6.956619E−21 1.250805E−20 7.608169E−21 −6.524213E−22 C5 3.866469E−25 2.467619E−24 −1.988373E−24 −7.379838E−27 C6 −7.623750E−30 −1.675469E−28 2.670495E−28 −9.847764E−31 SRF 62 64 K 0 0 C1 6.908374E−08 −2.282295E−07 C2 −7.414546E−12 −2.062783E−11 C3 1.971662E−16 1.258799E−15 C4 −5.334580E−20 −2.146440E−19 C5 5.884223E−24 4.332875E−23 C6 −3.743875E−28 −1.189088E−27

TABLE 10 SURFACE RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 51.000259 64.0 1 1084.670740 20.061470 SILUV 1.560491 84.0 2 −489.591572 8.024505 85.7 3 147.977412 33.265720 SILUV 1.560491 93.2 4 533.607588 60.035648 91.5 5 162.257926 31.487872 SILUV 1.560491 79.2 6 −641.542087 12.321334 75.9 7 88.691635 37.381348 SILUV 1.560491 60.1 8 113.767960 26.723349 45.6 9 −117.888976 42.501530 SILUV 1.560491 42.0 10 −162.865349 13.700402 59.6 11 −116.482373 32.902705 SILUV 1.560491 63.1 12 −306.816392 26.438566 83.9 13 −323.530175 41.085951 SILUV 1.560491 99.9 14 −137.244758 5.556612 105.5 15 −451.636628 44.589731 SILUV 1.560491 115.9 16 −154.769207 0.999820 119.2 17 392.370175 25.008628 SILUV 1.560491 118.0 18 3014.562689 0.999723 117.0 19 289.177591 25.844242 SILUV 1.560491 114.3 20 925.962044 84.999670 112.1 21 0.000000 −14.999476 REFL 175.2 22 −331.395343 −22.607980 SILUV 1.560491 89.7 23 3332.007318 −230.559976 87.1 24 98.691313 −12.500000 SILUV 1.560491 73.1 25 28881.747267 −55.643371 84.0 26 105.777999 −12.500000 SILUV 1.560491 89.4 27 190.916612 −27.579443 109.5 28 155.323230 27.579443 REFL 118.2 29 190.916612 12.500000 SILUV 1.560491 109.5 30 105.777999 55.643371 89.4 31 28881.747267 12.500000 SILUV 1.560491 84.0 32 98.691313 230.560091 73.1 33 3332.007318 22.607980 SILUV 1.560491 87.1 34 −331.395343 14.999815 89.7 35 0.000000 −85.031452 REFL 185.4 36 632.234731 −21.937556 SILUV 1.560491 116.1 37 312.776852 −1.989523 118.6 38 −419.317799 −39.548184 SILUV 1.560491 126.0 39 679.933212 −11.879717 126.0 40 −359.055554 −33.826228 SILUV 1.560491 122.0 41 1713.588185 −6.930143 120.4 42 −130.793879 −40.665153 SILUV 1.560491 103.0 43 −297.152405 −24.525611 97.5 44 888.942670 −10.000074 SILUV 1.560491 94.8 45 −95.853886 −38.822971 77.7 46 −1286.530610 −10.502279 SILUV 1.560491 78.3 47 −122.332491 −53.312951 80.5 48 −1046.310490 −29.995767 SILUV 1.560491 98.8 49 −3155.314818 −35.731529 106.3 50 −2635.516216 −38.906996 SILUV 1.560491 121.6 51 253.216058 −1.026566 125.0 52 −477.178385 −27.726167 SILUV 1.560491 136.5 53 −1111.410551 −1.006437 137.0 54 −419.465047 −45.153215 SILUV 1.560491 138.9 55 657.652879 −27.561809 138.4 56 0.000000 11.279146 129.1 57 −1714.364190 −34.463306 SILUV 1.560491 133.1 58 435.051330 −26.422505 131.9 59 −217.425708 −40.030383 SILUV 1.560491 113.2 60 191072.918549 −0.999778 109.6 61 −106.841172 −32.593766 SILUV 1.560491 85.0 62 −202.323930 −0.999427 77.0 63 −79.299863 −25.891843 SILUV 1.560491 63.5 64 −117.061751 −0.998476 52.9 65 −70.340516 −36.868819 SILUV 1.560491 46.7 66 0.000000 −1.001571 H2OV193 1.436823 20.5 67 0.000000 0.000000 19.0

TABLE 10A ASPHERIC CONSTANTS SRF 6 15 23 24 32 K 0 0 0 0 0 C1 8.416890E−08 −2.308559E−08 −8.485003E−09 −1.223767E−07 −1.223767E−07 C2 1.006640E−12 1.109550E−13 −6.734945E−14 −7.438273E−12 −7.438273E−12 C3 3.617643E−16 −6.344353E−18 5.661979E−19 −4.704304E−16 −4.704304E−16 C4 −4.192188E−20 1.566682E−22 −2.504587E−22 3.963572E−21 3.963572E−21 C5 6.704096E−26 −4.902118E−27 2.908669E−26 −6.736661E−24 −6.736661E−24 C6 1.721955E−28 4.306889E−32 −1.350234E−30 −4.531767E−28 −4.531767E−28 SRF 33 43 45 47 50 K 0 0 0 0 0 C1 −8.485003E−09 −3.497951E−09 −4.202804E−08 6.218114E−08 3.138180E−08 C2 −6.734945E−14 −5.106017E−13 1.982600E−12 4.755456E−12 −3.924136E−13 C3 5.661979E−19 6.844726E−17 −1.463517E−16 4.467358E−16 5.657046E−18 C4 −2.504587E−22 −3.263478E−21 9.687863E−21 2.313332E−20 −6.552593E−22 C5 2.908669E−26 9.349870E−26 2.764278E−24 −3.886568E−24 2.087202E−26 C6 −1.350234E−30 2.248476E−30 7.460803E−29 4.543438E−28 −5.207993E−31 SRF 55 62 64 K 0 0 0 C1 −5.022929E−10 −2.500268E−08 −1.132630E−07 C2 −3.387071E−14 −7.360583E−12 −3.255025E−11 C3 −1.887886E−17 1.175353E−15 6.754420E−15 C4 6.061750E−22 −2.566402E−19 −9.778374E−19 C5 −8.730441E−27 2.406082E−23 6.403897E−23 C6 4.736715E−32 −1.314800E−27 1.523975E−27

TABLE 11 SURF RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 42.716567 63.0 1 187.082284 29.074103 SIO2 1.560491 87.7 2 1122.624300 13.704059 87.8 3 257.788495 25.970502 SIO2 1.560491 89.3 4 4087.923719 6.751806 88.2 5 149.090802 9.999268 SIO2 1.560491 84.3 6 112.190840 20.619019 79.4 7 222.671339 39.005001 SIO2 1.560491 79.4 8 −171.486868 0.999098 77.9 9 72.242638 58.534093 SIO2 1.560491 61.0 10 103.263585 23.657309 38.2 11 −120.537552 36.218695 SIO2 1.560491 39.7 12 −79.009690 13.559024 52.6 13 −70.743286 10.000301 SIO2 1.560491 55.6 14 −406.875493 15.578104 72.7 15 −167.014571 41.099022 SIO2 1.560491 76.7 16 −97.881974 0.999302 86.2 17 −289.132352 49.908319 SIO2 1.560491 102.4 18 −127.491717 0.999640 108.2 19 −915.187280 29.128849 SIO2 1.560491 114.2 20 −267.279137 70.000315 116.1 21 0.000000 −99.530888 REFL 163.4 22 −211.224346 −59.634155 SIO2 1.560491 129.3 23 847.318306 −285.786240 127.5 24 108.606993 −12.500000 SIO2 1.560491 68.7 25 −2037.814268 −40.801930 77.3 26 98.650256 −12.500000 SIO2 1.560491 79.4 27 173.699507 −12.863441 95.4 28 147.630649 12.863441 REFL 98.7 29 173.699507 12.500000 SIO2 1.560491 95.4 30 98.650256 40.801930 79.4 31 −2037.814268 12.500000 SIO2 1.560491 77.3 32 108.606993 285.786240 68.7 33 847.318306 59.634155 SIO2 1.560491 127.5 34 −211.224346 81.116047 129.3 35 0.000000 −73.612596 REFL 160.7 36 −389.330139 −33.487696 SIO2 1.560491 114.9 37 1028.934202 −0.999947 113.5 38 −174.265376 −32.363134 SIO2 1.560491 104.3 39 −396.847027 −1.000532 99.8 40 −121.243745 −48.918207 SIO2 1.560491 89.3 41 −131.171270 −29.702617 71.3 42 335.952888 −10.034790 SIO2 1.560491 69.3 43 −82.977553 −43.925742 61.4 44 142.301184 −9.999862 SIO2 1.560491 63.2 45 −263.305242 −23.458962 74.7 46 2291.125201 −61.398344 SIO2 1.560491 84.5 47 165.812687 −1.061241 103.9 48 486.553030 −37.309271 SIO2 1.560491 113.9 49 194.984003 −21.455915 120.7 50 −2153.235102 −50.329924 SIO2 1.560491 142.6 51 291.296473 −0.999132 144.8 52 −443.499291 −44.594835 SIO2 1.560491 146.7 53 1173.500711 −8.577265 145.5 54 0.000000 7.578035 138.4 55 −337.532449 −35.808358 SIO2 1.560491 139.1 56 −1836.960645 −1.165380 136.4 57 −439.395199 −28.816834 SIO2 1.560491 133.5 58 2161.178835 −0.998190 130.3 59 −260.497359 −36.004531 SIO2 1.560491 115.8 60 5382.003743 −0.997164 110.1 61 −122.176927 −36.201583 SIO2 1.560491 86.2 62 −321.548352 −1.000000 76.5 63 −54.686592 −41.835126 SIO2 1.560491 49.5 64 0.000000 −3.000000 H2O 1.436823 25.2 65 0.000000 0.000000 18.8

TABLE 11A ASPHERIC CONSTANTS SRF 8 14 19 22 25 K 0 0 0 0 0 C1 1.079370E−07 7.669220E−08 −7.045424E−09 1.010508E−08 3.738770E−08 C2 1.064327E−12 −1.973038E−11 −3.066122E−14 1.795924E−13 −3.496492E−12 C3 −4.566909E−16 2.138994E−15 −4.118337E−18 1.934995E−18 3.233016E−16 C4 1.905320E−19 −1.074179E−19 3.495758E−22 1.389960E−22 −3.498294E−20 C5 −1.972022E−23 −2.090955E−24 −2.483792E−26 −5.289985E−27 2.704951E−24 C6 8.751032E−28 4.279927E−28 4.016359E−31 1.320749E−31 −9.856748E−29 SRF 31 34 42 46 48 K 0 0 0 0 0 C1 3.738770E−08 1.010508E−08 3.117477E−08 8.249850E−08 4.142725E−08 C2 −3.496492E−12 1.795924E−13 −1.385143E−11 −1.955317E−13 −2.012061E−12 C3 3.233016E−16 1.934995E−18 2.707311E−15 −8.022466E−17 1.566310E−17 C4 −3.498294E−20 1.389960E−22 −3.351896E−19 −1.723197E−20 1.046236E−22 C5 2.704951E−24 −5.289985E−27 2.318550E−23 −8.777152E−25 3.404661E−25 C6 −9.856748E−29 1.320749E−31 −7.018917E−28 −2.800720E−28 −8.280605E−30 SRF 51 57 60 K 0 0 0 C1 3.292883E−10 4.807681E−08 3.409977E−09 C2 −7.254285E−13 −2.265563E−12 −3.641765E−12 C3 2.476488E−17 6.703492E−17 2.594792E−16 C4 −1.056859E−21 −1.704146E−21 −1.764035E−20 C5 4.966804E−26 4.472968E−26 7.777614E−25 C6 −8.485797E−31 −6.865707E−31 −1.797945E−29

TABLE 12 SURF RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 35.040681 61.5 1 210.405327 30.736588 SIO2 1.560491 81.0 2 −829.214191 5.286654 81.6 3 107.948426 51.211605 SIO2 1.560491 82.3 4 81.561700 24.185596 66.5 5 129.355284 38.167801 SIO2 1.560491 67.5 6 −166.842164 0.997639 65.8 7 73.621253 52.812760 SIO2 1.560491 55.2 8 87.502326 23.343983 35.4 9 −63.355137 18.274984 SIO2 1.560491 38.4 10 −64.795456 15.650649 46.8 11 −65.436171 11.477841 SIO2 1.560491 52.6 12 −192.744558 16.904355 69.7 13 −246.808133 48.828721 SIO2 1.560491 85.8 14 −107.969356 0.997713 94.9 15 −447.790890 56.851474 SIO2 1.560491 111.1 16 −133.844748 0.997553 116.8 17 315.857486 38.321196 SIO2 1.560491 120.8 18 −1923.797869 0.996321 119.7 19 232.932637 43.497172 SIO2 1.560491 114.0 20 −887.954229 59.994922 110.5 21 0.000000 −177.093526 REFL 80.1 22 102.645236 −12.500000 SIO2 1.560491 67.0 23 942.361489 −43.357484 77.8 24 90.416551 −12.500000 SIO2 1.560491 79.9 25 149.946360 −13.736983 97.4 26 131.782255 13.736983 REFL 100.5 27 149.946360 12.500000 SIO2 1.560491 97.4 28 90.416551 43.357484 79.9 29 942.361489 12.500000 SIO2 1.560491 77.8 30 102.645236 177.093526 67.0 31 0.000000 −60.055220 REFL 75.6 32 104914.890260 −35.073765 SIO2 1.560491 98.4 33 219.963934 −0.997320 101.4 34 −485.974374 −33.321196 SIO2 1.560491 106.4 35 531.348627 −0.997416 106.7 36 −179.150861 −35.974078 SIO2 1.560491 104.0 37 −726.299833 −0.997789 101.1 38 −143.133378 −31.466370 SIO2 1.560491 92.9 39 −333.246416 −43.619093 87.4 40 149.805913 −9.999074 SIO2 1.560491 78.6 41 −96.090593 −42.639692 69.3 42 224.529027 −9.998160 SIO2 1.560491 70.5 43 −264.668390 −13.559760 81.5 44 −938.629305 −29.640517 SIO2 1.560491 87.3 45 304.621140 −22.447192 93.1 46 −943.485170 −40.752283 SIO2 1.560491 115.1 47 271.215785 −2.888195 119.3 48 −456.833471 −43.199885 SIO2 1.560491 132.8 49 693.683615 −0.999609 133.5 50 −281.164030 −30.395117 SIO2 1.560491 132.9 51 −613.816799 −6.979889 131.4 52 0.000000 4.747264 128.8 53 −323.801518 −45.333595 SIO2 1.560491 131.0 54 567.522747 −0.997957 129.5 55 −227.500831 −39.940578 SIO2 1.560491 115.7 56 2013.736081 −0.994433 111.6 57 −127.539619 −33.332450 SIO2 1.560491 88.1 58 −263.904129 −0.995386 79.4 59 −186.455700 −17.466462 SIO2 1.560491 75.0 60 −223.493619 −1.000000 65.7 61 −50.654088 −43.114607 SIO2 1.560491 46.1 62 0.000000 −1.001571 H2O 1.436823 20.2 63 0.000000 0.000000 18.4

TABLE 12A ASPHERIC CONSTANTS SRF 6 15 20 23 29 K 0 0 0 0 0 C1 1.415105E−07 −3.894450E−08 3.025563E−08 1.956249E−08 1.956249E−08 C2 2.826103E−11 2.477873E−13 −9.725078E−13 −1.254267E−12 −1.254267E−12 C3 −2.796060E−15 −1.083388E−17 5.264859E−17 9.958049E−17 9.958049E−17 C4 −2.054534E−20 −9.685453E−22 −2.790853E−21 −1.339908E−20 −1.339908E−20 C5 2.141589E−23 4.488758E−26 1.033038E−25 1.243181E−24 1.243181E−24 C6 2.934466E−27 −1.114090E−30 −1.853921E−30 −1.590289E−29 −1.590289E−29 SRF 39 40 42 46 53 K 0 0 0 0 0 C1 −2.460699E−08 −1.818564E−07 9.053886E−08 2.136533E−08 3.430277E−08 C2 7.712743E−13 −5.379726E−12 −1.959930E−12 6.940713E−13 2.113104E−13 C3 −8.069808E−17 1.480406E−15 −3.377347E−17 −1.785783E−17 −8.054096E−17 C4 −5.118403E−22 −1.519056E−19 3.600872E−20 −1.433861E−21 3.084255E−21 C5 −4.277639E−25 1.009523E−23 −8.476096E−24 1.884530E−25 −3.491487E−26 C6 1.160028E−29 −4.043479E−28 3.114715E−28 −8.828841E−30 5.775365E−32 SRF 55 58 K 0 0 C1 2.382259E−08 9.580994E−08 C2 −8.346810E−13 −3.279417E−11 C3 1.015704E−16 5.067874E−15 C4 5.829694E−22 −5.784345E−19 C5 6.456340E−26 4.554897E−23 C6 −7.406922E−30 −1.883439E−27

TABLE 13 SURF RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 35.000921 64.0 1 187.873268 27.994570 SIO2 1.560491 84.8 2 1232.241084 0.999905 84.9 3 208.335351 22.691065 SIO2 1.560491 85.8 4 516.062469 36.805573 84.3 5 144.085611 11.684135 SIO2 1.560491 79.4 6 104.200976 18.908624 74.4 7 198.091293 38.252361 SIO2 1.560491 74.7 8 −192.861116 2.099088 73.3 9 68.893595 56.883996 SIO2 1.560491 61.6 10 85.948719 33.744342 40.9 11 −114.007614 22.821973 SIO2 1.560491 45.3 12 −76.222967 9.221322 52.2 13 −67.210067 9.999789 SIO2 1.560491 53.7 14 −429.663877 10.809503 70.6 15 −265.085106 43.979820 SIO2 1.560491 76.7 16 −101.149234 0.999957 85.3 17 −188.336349 61.381983 SIO2 1.560491 94.4 18 −125.228059 0.999649 108.4 19 −831.599269 31.650721 SIO2 1.560491 113.5 20 −227.778209 70.000634 115.5 21 0.000000 −10.976723 REFL 113.6 22 −197.591390 −49.195844 SIO2 1.560491 114.4 23 1113.814097 −282.271651 112.2 24 95.811897 −12.500000 SIO2 1.560491 68.9 25 1585.519591 −38.490833 81.2 26 106.142717 −12.500000 SIO2 1.560491 83.5 27 160.434031 −12.092178 98.0 28 144.603311 12.092178 REFL 101.8 29 160.434031 12.500000 SIO2 1.560491 98.0 30 106.142717 38.490833 83.5 31 1585.519591 12.500000 SIO2 1.560491 81.2 32 95.811897 282.271651 68.9 33 1113.814097 49.195844 SIO2 1.560491 112.2 34 −197.591390 10.976723 114.4 35 0.000000 −70.000758 REFL 113.0 36 −227.942708 −45.666153 SIO2 1.560491 113.9 37 815.467694 −8.857490 111.9 38 −130.706498 −42.732270 SIO2 1.560491 96.7 39 −422.473074 −3.774367 91.0 40 −347.973618 −10.000122 SIO2 1.560491 87.2 41 −187.015492 −26.831797 79.4 42 305.312838 −9.999427 SIO2 1.560491 77.7 43 −96.429310 −63.819408 67.9 44 128.506823 −9.999684 SIO2 1.560491 71.4 45 −306.117569 −15.977415 85.1 46 4806.899558 −32.925545 SIO2 1.560491 89.1 47 230.072868 −16.329646 96.4 48 1322.097164 −30.272168 SIO2 1.560491 111.8 49 252.570224 −1.000013 117.3 50 −862.460198 −42.042752 SIO2 1.560491 133.4 51 448.126973 −5.878180 135.8 52 −378.669699 −51.982596 SIO2 1.560491 142.6 53 730.087868 −26.644994 141.8 54 0.000000 0.211836 130.3 55 −454.237341 −34.638587 SIO2 1.560491 132.4 56 896.710905 −0.999763 131.1 57 −281.292658 −31.904925 SIO2 1.560491 122.1 58 −1508.491985 −0.999650 118.8 59 −157.343378 −32.737319 SIO2 1.560491 105.3 60 −431.549831 −0.998214 98.8 61 −227.748250 −34.282018 SIO2 1.560491 96.4 62 1679.133063 −1.000000 90.0 63 −57.914528 −47.987219 SIO2 1.560491 52.2 64 0.000000 −3.000000 H2O 1.436822 24.4 65 0.000000 0.000000 19.0

TABLE 13A ASPHERIC CONSTANTS SRF 8 19 22 25 31 K 0 0 0 0 0 C1 8.300393E−08 −1.573837E−08 1.023614E−08 2.221568E−08 2.221568E−08 C2 1.027628E−11 −1.239737E−13 1.645106E−13 −1.740421E−12 −1.740421E−12 C3 −1.162954E−15 4.333229E−19 5.476658E−18 8.521877E−17 8.521877E−17 C4 2.985096E−19 4.074898E−23 5.702605E−23 −2.769929E−21 −2.769929E−21 C5 −2.802134E−23 −1.053291E−26 9.144213E−28 −2.436823E−25 −2.436823E−25 C6 1.422951E−27 3.216727E−31 2.477447E−32 1.867891E−29 1.867891E−29 SRF 34 37 39 42 48 K 0 0 0 0 0 C1 1.023614E−08 −2.156946E−08 2.940607E−08 −4.027138E−08 3.236874E−08 C2 1.645106E−13 7.245612E−13 −3.554065E−12 −8.699926E−12 −3.262283E−13 C3 5.476658E−18 −3.214615E−17 2.494890E−16 1.342629E−15 2.281353E−17 C4 5.702605E−23 1.250838E−21 −1.750741E−20 −1.587155E−19 2.583318E−22 C5 9.144213E−28 −3.654841E−26 8.304704E−25 1.051342E−23 −8.007782E−27 C6 2.477447E−32 5.939707E−31 −4.233041E−29 −3.667649E−28 2.555841E−30 SRF 55 57 60 K 0 0 0 C1 2.858710E−08 −6.660513E−09 −8.504243E−08 C2 −4.529671E−13 1.798520E−13 9.820443E−13 C3 −2.789924E−17 8.149876E−17 −5.540310E−17 C4 2.259110E−21 −5.213396E−22 1.576819E−20 C5 −7.538599E−26 −1.301705E−27 −9.640368E−25 C6 9.633331E−31 −5.575917E−31 1.171801E−29

TABLE 15 SURF RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 35.638328 64.5 1 180.670546 28.377083 SIO2 1.560491 86.9 2 823.598018 1.194225 86.9 3 205.952639 21.462318 SIO2 1.560491 87.9 4 398.186838 32.742116 86.4 5 132.286925 9.999671 SIO2 1.560491 82.8 6 105.118100 22.332626 78.4 7 169.334381 39.894990 SIO2 1.560491 78.9 8 −204.634515 0.998375 77.3 9 71.137197 56.763393 SIO2 1.560491 63.5 10 89.028585 28.411826 42.3 11 −109.689407 29.990063 SIO2 1.560491 42.5 12 −79.244543 11.316478 52.9 13 −69.719014 9.999481 SIO2 1.560491 55.1 14 −486.086468 8.908815 72.6 15 −280.858669 63.675056 SIO2 1.560491 77.0 16 −111.752476 0.999172 95.1 17 −263.723959 47.422516 SIO2 1.560491 107.8 18 −134.607968 0.998507 113.2 19 −648.995845 28.867753 SIO2 1.560491 116.3 20 −239.623615 69.998695 118.1 21 0.000000 −9.999382 REFL 115.6 22 −176.982011 −52.138664 SIO2 1.560491 117.7 23 2325.743514 −250.507300 115.3 24 98.260574 −12.500000 SIO2 1.560491 68.0 25 8846.828964 −46.770944 78.6 26 91.149491 −12.500000 SIO2 1.560491 80.6 27 149.955261 −18.614447 98.7 28 143.121066 18.614447 REFL 106.4 29 149.955261 12.500000 SIO2 1.560491 98.7 30 91.149491 46.770944 80.6 31 8846.828964 12.500000 SIO2 1.560491 78.6 32 98.260574 250.507300 68.0 33 2325.743514 52.138664 SIO2 1.560491 115.3 34 −176.982011 9.999382 117.7 35 0.000000 −69.999093 REFL 117.4 36 −198.540813 −50.399536 SIO2 1.560491 120.7 37 −96842.830748 −0.998438 118.2 38 −171.973861 −30.749387 SIO2 1.560491 106.4 39 −310.515975 −0.999047 100.9 40 −148.789628 −29.674304 SIO2 1.560491 92.9 41 −216.223375 −29.457017 83.9 42 244.105965 −9.998957 SIO2 1.560491 81.6 43 −94.244903 −51.985700 68.7 44 177.704589 −9.999140 SIO2 1.560491 70.5 45 −255.547186 −23.809565 80.1 46 1016.476754 −31.174795 SIO2 1.560491 85.3 47 185.094367 −0.999190 93.0 48 1691.382932 −25.547970 SIO2 1.560491 105.3 49 356.397350 −45.184652 109.5 50 −673.758971 −45.536220 SIO2 1.560491 137.5 51 386.080342 −0.998330 139.3 52 −725.704793 −34.052538 SIO2 1.560491 143.2 53 1177.576128 −20.729220 143.2 54 0.000000 19.731628 138.3 55 −296.953200 −49.211938 SIO2 1.560491 142.1 56 755.844934 −0.996608 140.3 57 −413.530408 −40.022653 SIO2 1.560491 135.6 58 728.550434 −0.994509 133.1 59 −253.678570 −33.049432 SIO2 1.560491 114.4 60 −3840.733691 −0.992017 108.6 61 −147.857222 −36.663873 SIO2 1.560491 91.0 62 −727.362791 −1.000000 82.4 63 −54.588882 −41.518373 SIO2 1.560491 49.4 64 0.000000 −3.000000 H2O 1.436822 25.6 65 0.000000 0.000000 19.1

TABLE 15A ASPHERIC CONSTANTS SRF 8 19 22 25 31 K 0 0 0 0 0 C1 1.080775E−07 −1.359371E−08 1.195268E−08 1.894952E−08 1.894952E−08 C2 4.576422E−12 −1.179706E−13 3.137653E−13 −2.377925E−12 −2.377925E−12 C3 −8.540180E−16 −1.702891E−18 4.990292E−18 2.890682E−16 2.890682E−16 C4 2.711292E−19 8.483261E−23 5.081387E−22 −5.626586E−20 −5.626586E−20 C5 −3.150111E−23 −9.645405E−27 −1.599365E−26 6.907483E−24 6.907483E−24 C6 1.652368E−27 2.669817E−31 6.313609E−31 −3.643846E−28 −3.643846E−28 SRF 34 42 46 48 51 K 0 0 0 0 0 C1 1.195268E−08 −5.071114E−08 2.526230E−08 1.948430E−08 −7.924272E−09 C2 3.137653E−13 −7.730551E−12 5.333528E−12 −3.427570E−12 −2.800312E−13 C3 4.990292E−18 1.390231E−15 −2.388835E−16 8.808674E−17 −1.107739E−18 C4 5.081387E−22 −1.451491E−19 1.259420E−20 −8.959654E−22 −6.249802E−22 C5 −1.599365E−26 9.288570E−24 −1.438626E−24 8.169992E−25 3.539057E−26 C6 6.313609E−31 −2.767389E−28 4.673358E−29 −4.150555E−29 −3.955788E−31 SRF 56 57 60 K 0 0 0 C1 −5.185154E−08 2.760546E−08 2.284067E−09 C2 1.533838E−12 −1.425919E−12 −5.023236E−12 C3 −3.899899E−17 4.438919E−17 4.371011E−16 C4 2.974803E−21 1.556484E−21 −3.186523E−20 C5 −1.127749E−25 −7.877661E−26 1.530451E−24 C6 1.290864E−30 3.875637E−31 −3.713691E−29

TABLE 16 SURF RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 35.000018 61.5 1 176.014829 27.505489 SIO2 1.560491 83.2 2 841.641338 3.539440 83.3 3 235.708002 18.995896 SIO2 1.560491 84.2 4 435.386108 31.751453 83.2 5 145.827863 9.997737 SIO2 1.560491 81.5 6 108.756276 21.241416 77.5 7 172.246858 43.116768 SIO2 1.560491 78.7 8 −170.835113 1.011739 77.5 9 69.519772 62.982649 SIO2 1.560491 62.1 10 79.357512 24.125307 37.1 11 −105.554185 28.151777 SIO2 1.560491 40.1 12 −75.432491 8.970185 50.0 13 −65.960377 9.998436 SIO2 1.560491 51.6 14 −458.378416 15.879266 68.1 15 −182.010566 40.279435 SIO2 1.560491 74.6 16 −98.619683 0.998823 84.4 17 −298.466841 53.135226 SIO2 1.560491 100.4 18 −121.383228 0.999120 106.3 19 −835.480319 32.135277 SIO2 1.560491 109.9 20 −214.880198 81.470423 111.6 21 0.000000 −104.650759 REFL 105.0 22 −181.003736 −50.001353 SIO2 1.560491 108.2 23 25242.924145 −247.127318 104.9 24 102.272953 −12.500000 SIO2 1.560491 70.6 25 2103.060508 −45.023548 79.1 26 93.409938 −12.500000 SIO2 1.560491 81.3 27 183.538848 −17.774476 102.5 28 145.905578 17.774476 REFL 106.5 29 183.538848 12.500000 SIO2 1.560491 102.5 30 93.409938 45.023548 81.3 31 2103.060508 12.500000 SIO2 1.560491 79.1 32 102.272953 247.127318 70.6 33 25242.924145 50.001353 SIO2 1.560491 104.9 34 −181.003736 104.650759 108.2 35 0.000000 −69.997840 REFL 105.8 36 −274.353554 −38.229015 SIO2 1.560491 110.1 37 1131.690506 −0.997876 108.9 38 −183.833011 −33.580596 SIO2 1.560491 101.6 39 −632.386130 −3.643030 97.6 40 −138.532192 −34.568737 SIO2 1.560491 86.8 41 −189.656554 −26.890307 75.9 42 255.989593 −9.998587 SIO2 1.560491 73.9 43 −92.462677 −50.122191 64.9 44 175.417954 −9.998324 SIO2 1.560491 68.1 45 −239.557458 −20.895117 78.3 46 893.327075 −36.743354 SIO2 1.560491 83.5 47 180.351521 −1.580032 92.3 48 1793.077203 −23.224027 SIO2 1.560491 102.7 49 346.025735 −46.740042 107.1 50 −587.720308 −49.840882 SIO2 1.560491 138.2 51 362.715565 −0.996413 139.9 52 −802.776800 −32.541316 SIO2 1.560491 143.2 53 1200.879163 −20.610535 143.1 54 0.000000 19.614848 138.0 55 −277.707719 −52.291236 SIO2 1.560491 141.8 56 708.666176 −0.995494 139.7 57 −424.462858 −35.408449 SIO2 1.560491 134.6 58 920.517618 −0.994818 131.9 59 −257.650413 −33.302544 SIO2 1.560491 115.0 60 −3892.659133 −0.993481 109.3 61 −150.518437 −37.001664 SIO2 1.560491 91.7 62 −815.328045 −1.000000 83.2 63 −54.709895 −42.146539 SIO2 1.560491 49.5 64 0.000000 −3.000000 H2O 1.436822 24.8 65 0.000000 0.000000 18.4

TABLE 16A ASPHERIC CONSTANTS SRF 8 19 22 25 31 K 0 0 0 0 0 C1 9.477707E−08 −1.630325E−08 8.446555E−09 3.545371E−09 3.545371E−09 C2 1.961231E−12 −9.812446E−14 2.275492E−13 −6.774437E−13 −6.774437E−13 C3 −4.595943E−16 −1.945238E−18 −8.360514E−19 4.237596E−17 4.237596E−17 C4 2.712352E−19 2.190264E−22 1.164424E−21 −5.726376E−21 −5.726376E−21 C5 −3.717129E−23 −2.392299E−26 −6.873389E−26 1.719638E−25 1.719638E−25 C6 2.062145E−27 8.993812E−31 2.030241E−30 1.264086E−29 1.264086E−29 SRF 34 42 46 48 51 K 0 0 0 0 0 C1 8.446555E−09 −3.731377E−08 −7.541203E−09 3.402805E−08 −7.582220E−09 C2 2.275492E−13 −5.506103E−12 3.280912E−12 −2.111476E−12 −1.607342E−13 C3 −8.360514E−19 1.183283E−15 −1.338960E−16 3.392400E−17 −9.929315E−18 C4 1.164424E−21 −1.705010E−19 −2.204551E−20 −3.518123E−21 −4.709955E−22 C5 −6.873389E−26 1.532771E−23 5.087511E−26 1.006578E−24 4.064977E−26 C6 2.030241E−30 −6.241836E−28 −4.751065E−28 −2.276157E−29 −5.868799E−31 SRF 56 57 60 K 0 0 0 C1 −5.466505E−08 3.173474E−08 4.604026E−09 C2 1.620583E−12 −1.360966E−12 −4.261817E−12 C3 −3.331287E−17 4.744992E−17 3.289463E−16 C4 2.561164E−21 9.163771E−22 −2.280425E−20 C5 −1.070898E−25 −7.066436E−26 9.960289E−25 C6 1.395421E−30 7.159877E−31 −2.271390E−29

TABLE 17 SURF RADIUS THICKNESS MATERIAL INDEX SEMIDIAM. 0 0.000000 35.062171 61.5 1 160.377892 33.915692 SIO2 1.560491 85.2 2 4339.545820 35.211752 85.0 3 134.501543 9.996831 SIO2 1.560491 83.7 4 111.692176 24.343835 80.0 5 176.022408 44.412851 SIO2 1.560491 81.0 6 −158.125766 1.097941 79.5 7 70.127955 63.281412 SIO2 1.560491 62.6 8 80.899024 23.149420 37.4 9 −104.439732 28.493683 SIO2 1.560491 39.7 10 −76.691544 9.373106 50.2 11 −66.201313 9.999364 SIO2 1.560491 51.9 12 −449.321456 12.356383 69.1 13 −193.830863 41.850652 SIO2 1.560491 73.7 14 −96.808240 0.997395 83.6 15 −309.193570 53.879882 SIO2 1.560491 100.4 16 −121.506051 0.996721 106.4 17 −1347.934891 32.667851 SIO2 1.560491 110.7 18 −232.958167 69.997839 112.2 19 0.000000 −95.009945 REFL 106.8 20 −169.601782 −49.964697 SIO2 1.560491 108.4 21 −2559.597028 −244.909101 104.7 22 94.645450 −12.500000 SIO2 1.560491 70.0 23 2366.726589 −50.185589 83.9 24 96.645650 −12.500000 SIO2 1.560491 86.5 25 158.153978 −11.143815 106.9 26 150.128583 11.143815 REFL 111.0 27 158.153978 12.500000 SIO2 1.560491 106.9 28 96.645650 50.185589 86.5 29 2366.726589 12.500000 SIO2 1.560491 83.9 30 94.645450 244.909101 70.0 31 −2559.597028 49.964697 SIO2 1.560491 104.7 32 −169.601782 95.009945 108.4 33 0.000000 −69.996314 REFL 106.9 34 −281.792007 −41.385881 SIO2 1.560491 110.8 35 657.889902 −0.997396 109.7 36 −174.312217 −32.438650 SIO2 1.560491 100.1 37 −476.477690 −1.935634 95.7 38 −123.498799 −34.625674 SIO2 1.560491 85.0 39 −152.214034 −29.454227 73.4 40 230.398053 −9.988522 SIO2 1.560491 71.5 41 −84.263230 −42.301978 62.8 42 148.358426 −9.995751 SIO2 1.560491 64.2 43 −285.965468 −29.500257 76.2 44 1365.214672 −52.201213 SIO2 1.560491 91.3 45 197.964169 −1.405485 110.1 46 471.452295 −43.072393 SIO2 1.560491 120.4 47 209.873148 −1.120291 130.5 48 −1186.156898 −60.630783 SIO2 1.560491 155.2 49 325.015642 −0.999174 157.9 50 −2211.880008 −27.251892 SIO2 1.560491 162.5 51 1353.381133 −0.997683 163.0 52 −333.578758 −60.245043 SIO2 1.560491 162.7 53 664.853013 −3.960500 160.4 54 0.000000 2.974292 153.2 55 −436.081909 −40.203050 SIO2 1.560491 152.1 56 1058.418471 −0.974875 149.3 57 −242.988440 −46.663567 SIO2 1.560491 127.0 58 1737.489827 −0.944194 120.7 59 −113.935104 −37.162408 SIO2 1.560491 86.5 60 −237.094762 −1.000000 75.1 61 −53.008742 −37.444181 SIO2 1.560491 48.1 62 0.000000 −3.000000 H2O 1.436823 26.7 63 0.000000 0.000000 18.4

TABLE 17A ASPHERIC CONSTANTS SRF 6 17 20 23 29 K 0 0 0 0 0 C1 1.567356E−07 −1.504554E−08 1.102741E−08 1.329977E−08 1.329977E−08 C2 −1.454311E−12 −1.033827E−13 3.161475E−13 −6.446967E−13 −6.446967E−13 C3 −4.821299E−16 −5.875858E−18 −3.234527E−18 2.574587E−17 2.574587E−17 C4 3.177351E−19 7.367131E−22 1.863348E−21 2.145483E−21 2.145483E−21 C5 −4.247779E−23 −5.690740E−26 −1.058278E−25 −6.859442E−25 −6.859442E−25 C6 2.417313E−27 1.690737E−30 3.288177E−30 4.363205E−29 4.363205E−29 SRF 32 40 44 46 49 K 0 0 0 0 0 C1 1.102741E−08 −7.623733E−08 5.961950E−08 4.163425E−08 1.556511E−08 C2 3.161475E−13 −2.696128E−12 2.260719E−12 −2.205874E−12 −9.513867E−13 C3 −3.234527E−18 1.720996E−15 1.675440E−17 −2.145810E−18 1.334037E−17 C4 1.863348E−21 −3.583626E−19 9.620913E−21 −9.265446E−21 −6.577842E−22 C5 −1.058278E−25 3.893269E−23 −4.439958E−24 1.471307E−24 4.785308E−26 C6 3.288177E−30 −1.781650E−27 −3.165933E−29 −4.599952E−29 −1.010940E−30 SRF 53 55 58 K 0 0 0 C1 −4.190276E−08 3.093715E−08 6.193974E−09 C2 1.643663E−12 −1.212659E−12 −3.507726E−12 C3 −4.727323E−17 4.234860E−17 2.841523E−16 C4 7.314393E−22 −1.652445E−21 −1.871154E−20 C5 7.386195E−27 5.642952E−26 7.577332E−25 C6 −2.389707E−31 −7.153949E−31 −1.502450E−29

TABLE 18 Tab. D_(max) D_(M) D_(M)/D_(max) Y′ NA N_(L) N_(OP) COMP1 COMP2 COMP3 1 256.8 235.2 0.92 14.4 1.2 23 3 12.4 284.5 94.8 3 252.9 243.3 0.96 14.4 1.1 25 3 14.5 362.4 120.8 9 270.6 230.6 0.85 16.0 1.2 28 3 11.7 328.9 109.6 10 277.8 236.4 0.85 16.0 1.2 28 3 12.1 337.6 112.5 11 293.4 197.4 0.67 16.0 1.3 27 3 10.9 293.0 97.7 12 267.0 201.0 0.75 16.0 1.25 27 3 10.7 288.4 96.1 13 285.2 203.6 0.71 16.0 1.25 27 3 11.4 308.0 102.7 15 286.4 212.8 0.74 16.1 1.3 27 3 10.5 283.8 94.6 16 286.4 213.0 0.74 15.4 1.3 27 3 11.0 297.6 99.2 17 326.0 222.0 0.68 15.4 1.35 26 3 11.6 302.5 100.8 

What is claimed is:
 1. A catadioptric projection objective for imaging a pattern, which is arranged on an object plane of the projection objective, to an image plane of the projection objective when the pattern is illuminated with ultraviolet light, the projection objective comprising: a first objective part for imaging the pattern to a first intermediate image, a second objective part for imaging the first intermediate image to a second intermediate image, wherein the second objective part comprises a concave mirror and at least one lens, a third objective part for imaging the second intermediate image to the image plane, and a first folding mirror for deflecting the light toward the concave mirror and a second folding mirror for deflecting the light from the concave mirror, wherein the second objective part comprises only one concave mirror, and wherein the concave mirror is an active mirror comprising manipulators configured to vary a shape of a reflective surface of the concave mirror to compensate for imaging errors.
 2. The catadioptric projection objective according to claim 1, wherein the concave mirror is arranged in a region of a pupil plane.
 3. The catadioptric projection objective according to claim 2, wherein the first and third objective parts have parallel optical axes and wherein the second objective part has an optical axis at a non-zero angle to the parallel optical axes.
 4. The catadioptric projection objective as claimed in claim 2, wherein the projection objective has an image-side numerical aperture NA of at least 1.3 if water is positioned between the third partial objective and the image plane and used as an immersion fluid.
 5. The catadioptric projection objective as claimed in claim 4, wherein the first objective part is configured to form the first intermediate image optically between the first folding mirror and the concave mirror in the second objective part.
 6. The catadioptric projection objective as claimed in claim 5, wherein, for at least a first pass of the light, the at least one lens in the second objective part is positioned optically between the first intermediate image and the concave mirror.
 7. The catadioptric projection objective as claimed in claim 5, wherein, for at least a first pass of the light, the at least one lens in the second objective part is positioned optically between the first folding mirror and the first intermediate image.
 8. The projection objective as claimed in claim 7, wherein the at least one lens is a biconvex positive lens.
 9. The catadioptric projection objective according to claim 8, wherein the catadioptric projection objective has no object-image-shift (OIS).
 10. The catadioptric projection objective as claimed in claim 4, wherein the first objective part is configured to form the first intermediate image optically between the object plane and the first deflecting mirror, and wherein the second objective part is configured to form the second intermediate image optically between second folding mirror and the image plane.
 11. The catadioptric projection objective as claimed in claim 4, wherein the first objective part comprises in order from the object plane to the first intermediate image: a first lens group comprising at least one positive lens; a second lens group comprising at least one negative lens; and a third lens group comprising at least one positive lens.
 12. The catadioptric projection objective as claimed in claim 11, wherein the second lens group comprises two negative lenses surrounding at least one positive lens.
 13. The catadioptric projection objective as claimed in claim 4, wherein the third objective part comprises a first lens group having a positive refractive power, a second lens group, which immediately follows the first lens group and has a negative refractive power, a third lens group which immediately follows the second lens group and has a positive refractive power, a fourth lens group which immediately follows the third lens group and has a positive refractive power, and an aperture stop which is arranged in a transitional region from the third lens group to the fourth lens group.
 14. The catadioptric projection objective as claimed in claim 13, wherein the third lens group has an entry surface which is located in a vicinity of a point of inflection of a marginal ray height between the second lens group and the third lens group, with no negative lens with any substantial refractive power being arranged between the entry surface and the aperture stop.
 15. The catadioptric projection objective as claimed in claim 14, wherein only positive lenses are arranged between the entry surface and the image plane.
 16. The catadioptric projection objective as claimed in claim 15, wherein all of the lenses between the aperture stop and image plane are positive lenses.
 17. The catadioptric projection objective as claimed in claim 1, wherein the first and second deflecting mirrors are different faces of a common prism.
 18. The catadioptric projection objective as claimed in claim 1, which is designed for ultraviolet light having a wavelength in a range between about 120 nm and about 260 nm.
 19. A catadioptric projection exposure system for microlithography comprising an illumination system and the projection objective as claimed in claim
 18. 20. A method for producing at least one of semiconductor components and other finely structured components, comprising: providing a mask with a predetermined pattern in a region of the object plane of the catadioptric projection objective according to claim 19; illuminating the mask with ultraviolet light at a predetermined wavelength; and projecting an image of the pattern onto a light-sensitive substrate, which is arranged in the region of the image plane of the projection objective, wherein, during projecting, the beam passes through an immersion medium which is arranged between a last optical surface of the projection objective and the substrate.
 21. A catadioptric projection objective for imaging a pattern, which is arranged on an object plane of the projection objective, to an image plane of the projection objective when the pattern is illuminated with ultraviolet light, the projection objective comprising: a first objective part, a second objective part, wherein the second objective part comprises a concave mirror and at least one lens, a third objective part, and a first folding mirror for deflecting the light toward the concave mirror and a second folding mirror for deflecting the light from the concave mirror, wherein the first, second, and third objective parts are arranged in order optically from the object plane to the image plane, wherein the concave mirror is positioned in a region of a pupil plane, wherein the concave mirror is an active mirror comprising manipulators configured to vary a shape of a reflective surface of the concave mirror to compensate for imaging errors, and wherein the projection objective has an image-side numerical aperture NA of at least 1.3 if water is positioned between the third partial objective and the image plane and used as an immersion fluid.
 22. The catadioptric projection objective according to claim 21, wherein the first and third objective parts have parallel optical axes and wherein the second objective part has an optical axis at a non-zero angle to the parallel optical axes.
 23. The catadioptric projection objective as claimed in claim 21, wherein the first objective part comprises in order from the object plane to the first intermediate image: a first lens group comprising at least one positive lens; a second lens group comprising at least one negative lens; and a third lens group comprising at least one positive lens.
 24. The catadioptric projection objective as claimed in claim 21, which is designed for ultraviolet light having a wavelength in a range between about 120 nm and about 260 nm.
 25. A catadioptric projection exposure system for microlithography comprising an illumination system and the projection objective as claimed in claim
 24. 26. A catadioptric projection objective for imaging a pattern, which is arranged on an object plane of the projection objective, to an image plane of the projection objective when the pattern is illuminated with ultraviolet light, the projection objective comprising: a first objective part for imaging the pattern onto a first intermediate image, a second objective part for imaging the first intermediate image to a second intermediate image, wherein the second objective part comprises a concave mirror and at least one lens, a third objective part for imaging the second intermediate image to the image plane, and a first folding mirror for deflecting the light toward the concave mirror and a second folding mirror for deflecting the light from the concave mirror, wherein the concave mirror is an active mirror comprising manipulators configured to vary a shape of a concave reflective surface of the concave mirror to compensate for imaging errors, wherein the first and third objective parts have parallel optical axes and wherein the second objective part has an optical axis at a non-zero angle to the parallel optical axes, and wherein the projection objective has an image-side numerical aperture NA of at least 1.3 if water is positioned between a last optical surface of the projection objective and the image plane and used as an immersion fluid.
 27. The catadioptric projection objective as claimed in claim 26, wherein, for at least a first pass of the light, the at least one lens in the second objective part is positioned optically between the first folding mirror and the first intermediate image.
 28. The catadioptric projection objective according to claim 26, wherein the concave mirror is arranged in a region of a pupil plane.
 29. The catadioptric projection objective according to claim 28, wherein the second objective part comprises only one concave mirror.
 30. A catadioptric projection exposure system for microlithography comprising an illumination system and the projection objective as claimed in claim
 26. 